Noncollisional heating and electron energy distributions in magnetically enhanced inductively coupled and helicon plasma sources

2001 ◽  
Vol 90 (8) ◽  
pp. 3699-3712 ◽  
Author(s):  
Ronald L. Kinder ◽  
Mark J. Kushner
Keyword(s):  
Electron Energy ◽  
Energy Distributions ◽  
Helicon Plasma ◽  
Plasma Sources ◽  
Inductively Coupled

Global model analysis of negative ion generation in low-pressure inductively coupled hydrogen plasmas with bi-Maxwellian electron energy distributions

2015 ◽  
Vol 22 (3) ◽  
pp. 033506 ◽  
Author(s):  
Sung-Ryul Huh ◽  
Nam-Kyun Kim ◽  
Bong-Ki Jung ◽  
Kyoung-Jae Chung ◽  
Yong-Seok Hwang ◽  
...  
Keyword(s):  
Electron Energy ◽  
Low Pressure ◽  
Model Analysis ◽  
Global Model ◽  
Negative Ion ◽  
Energy Distributions ◽  
Inductively Coupled ◽  
Hydrogen Plasmas ◽  
Ion Generation

Electron energy distributions in a magnetized inductively coupled plasma

2014 ◽  
Vol 21 (9) ◽  
pp. 093512 ◽  
Author(s):  
Sang-Heon Song ◽  
Yang Yang ◽  
Pascal Chabert ◽  
Mark J. Kushner
Keyword(s):  
Electron Energy ◽  
Inductively Coupled Plasma ◽  
Energy Distributions ◽  
Inductively Coupled

External control of electron energy distributions in a dual tandem inductively coupled plasma

2015 ◽  
Vol 118 (8) ◽  
pp. 083303 ◽  
Author(s):  
Lei Liu ◽  
Shyam Sridhar ◽  
Weiye Zhu ◽  
Vincent M. Donnelly ◽  
Demetre J. Economou ◽  
...  
Keyword(s):  
Electron Energy ◽  
Inductively Coupled Plasma ◽  
External Control ◽  
Energy Distributions ◽  
Inductively Coupled
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