Differences in SiC thermal oxidation process between crystalline surface orientations observed by in-situ spectroscopic ellipsometry
2010 ◽
Vol 160-162
◽
pp. 330-335
◽
Keyword(s):
2020 ◽
Vol 21
(5)
◽
pp. 385-389
2004 ◽
Vol 457-460
◽
pp. 1357-1360
◽
Keyword(s):
1995 ◽
Vol 196-201
◽
pp. 1817-1822
◽
2018 ◽
Vol 57
(43)
◽
pp. 14460-14469
◽