Passivation of phosphorus diffused silicon surfaces with Al2O3: Influence of surface doping concentration and thermal activation treatments
2021 ◽
Vol 16
(2)
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pp. 163-169
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2013 ◽
Vol 88
(4)
◽
pp. 375-379
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Keyword(s):
Keyword(s):
2000 ◽
Vol 47
(4)
◽
pp. 871-877
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Keyword(s):