Design of a novel passive flexure-based mechanism for microelectromechanical system optical switch assembly

2014 ◽  
Vol 85 (12) ◽  
pp. 125113 ◽  
Author(s):  
Jianbin Zhang ◽  
Xiantao Sun ◽  
Weihai Chen ◽  
Wenjie Chen ◽  
Lusha Jiang
Keyword(s):  
Optical Switch ◽  
Microelectromechanical System

Microactuator based on electroplated permanent magnets and flexible polydimethyl siloxane diaphragm

2008 ◽  
Vol 222 (3) ◽  
pp. 517-524 ◽  
Author(s):  
Y Su ◽  
H Wang ◽  
W Chen
Keyword(s):  
Permanent Magnets ◽  
Magnetic Energy ◽  
Optical Switch ◽  
Geometrical Parameters ◽  
Maximum Deflection ◽  
Polydimethyl Siloxane ◽  
Flexible Membrane ◽  
Microelectromechanical System ◽  
Planar Coil ◽  
A Current

The design, fabrication, and testing of a novel bidirectional magnetic microactuator were presented in the paper. The microactuator is composed of an integrated planar coil and a flexible polydimethyl siloxane (PDMS) diaphragm with embedded CoNiMnP-based permanent magnet arrays. There is a 7 × 7 array of magnets in a unit. The PDMS diaphragm is 2 mm × mm × 40 μm and the magnet post is 50 × 50 × 20 μm. Computer simulation was applied to verify the geometrical parameters. Electroplating under external magnetic field is carried out to improve the magnetic properties of the electroplated magnet, including coercivity, remanence and magnetic energy, and so on. The measured maximum coercivity, remanence and maximum magnetic energy were 2623 Oe (208.73 kA/m), 0.2 T (2000 G), and 10.15 kJ/m3 with the magnetic post, respectively. Moreover, and the deflection of the PDMS membrane is proportional to the exciting current. In a case of 0.35 A current, the maximum deflection of the membrane is 45 μm. Adjusting the electroplating mould results in the variation of the electroplated structure, thus the calibration of the microactuator. Due to the biomedical compatibility and simplicity of the fabrication, the flexible membrane-based microactuator is potential to be used as micropump and optical switch, the microelectromechanical system applications.

Scalable Active Optical Access Network Using Variable High-Speed PLZT Optical Switch/Splitter

2012 ◽  
Vol E95-B (3) ◽  
pp. 730-739 ◽  
Author(s):  
Kunitaka ASHIZAWA ◽  
Takehiro SATO ◽  
Kazumasa TOKUHASHI ◽  
Daisuke ISHII ◽  
Satoru OKAMOTO ◽  
...  
Keyword(s):  
High Speed ◽  
Optical Switch ◽  
Access Network ◽  
Optical Access ◽  
Optical Access Network

Polarisation-independent optical switch with cascaded optical switch matrices

1988 ◽  
Vol 24 (15) ◽  
pp. 959 ◽  
Author(s):  
H. Okayama ◽  
A. Matoba ◽  
R. Shibuya ◽  
T. Ishida
Keyword(s):  
Optical Switch

Recovery time for a silicon waveguide all-optical switch

1988 ◽  
Vol 24 (6) ◽  
pp. 303 ◽  
Author(s):  
P.D. Colbourne ◽  
P.E. Jessop
Keyword(s):  
Recovery Time ◽  
Optical Switch ◽  
Silicon Waveguide ◽  
All Optical ◽  
All Optical Switch

Experiment on deflector-selector optical switch matrix

1992 ◽  
Vol 28 (7) ◽  
pp. 638 ◽  
Author(s):  
H. Okayama ◽  
M. Kawahara
Keyword(s):  
Optical Switch

Practical low voltage 2×2 polarisation independent LiNbO3 digital optical switch

1991 ◽  
Vol 27 (12) ◽  
pp. 1025 ◽  
Author(s):  
A. McGuire ◽  
M. Scott ◽  
A.P. Thomas ◽  
R.C. Booth
Keyword(s):  
Low Voltage ◽  
Optical Switch
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