scholarly journals Fabrication of two dimensional polyethylene terephthalate nanofluidic chip using hot embossing and thermal bonding technique

2014 ◽  
Vol 8 (6) ◽  
pp. 066503 ◽  
Author(s):  
Zhifu Yin ◽  
E Cheng ◽  
Helin Zou ◽  
Li Chen ◽  
Shenbo Xu
Keyword(s):  
Polyethylene Terephthalate ◽  
Hot Embossing ◽  
Two Dimensional ◽  
Thermal Bonding ◽  
Bonding Technique ◽  
Nanofluidic Chip

A spring-driven press device for hot embossing and thermal bonding of PMMA microfluidic chips

2010 ◽  
Vol 31 (15) ◽  
pp. 2512-2519 ◽  
Author(s):  
Zhi Chen ◽  
Luyan Zhang ◽  
Gang Chen
Keyword(s):  
Hot Embossing ◽  
Microfluidic Chips ◽  
Thermal Bonding

Fabrication of Nanochannels on Polymer Thin Film

2009 ◽  
Author(s):  
Vinh-Nguyen Phan ◽  
Patrick Abgrall ◽  
Nam-Trung Nguyen ◽  
Peige Shao ◽  
Jeroen Anton Van Kan
Keyword(s):  
Thin Film ◽  
Low Cost ◽  
Base Material ◽  
Hot Embossing ◽  
Bonding Process ◽  
Thermal Bonding ◽  
Polymer Thin Film ◽  
Silicon Mold ◽  
Wide Range ◽  
Temperature And Pressure

Recent advances in nanotechnology allow the fabrication of structures down to the nanometer range. Various theoretical and experimental studies on the characteristics of fluid in nanochannels have been carried out in recent years. The results show that transport phenomena in nanoscale promise a wide range of applications in biological and chemical analysis. Practical applications require fabrication of nanochannels with a short production time and at a low cost. Polymer is considered as a suitable material for mass production of nanochannels due to the wide range of properties available, as well as the low cost of material and fabrication process. This paper reports the fabrication of planar nanochannels using hot embossing and thermal bonding technique on a polymer thin film. The mold for hot embossing was fabricated on a silicon wafer using photolithography and Reactive Ion Etching (RIE). Polymethylmethacrylate (PMMA) thin film with a thickness of 250 μm was used as the base material to emboss the nanochannels from the silicon mold. Temperature and pressure were controlled and recorded continuously during the embossing process. The channels then were examined by Atomic Force Microscope (AFM) in tapping mode to verify the width and the depth of the channel. Next, another piece of PMMA thin film was bonded to the first piece by thermal bonding process to make closed nanochannels. Temperature and pressure during the bonding process were controlled and recorded. Access to the channels was made on the thin film by a laser cutter before embossing. The results showed that open planar channels with the depth down to 30nm can be fabricated on PMMA thin film with a process time less than 30 minutes. Width and depth of the channels agree well with appropriate dimensions on the mold. Bonding can be achieved within 40 minutes. Closed planar channels with the depth of 300nm were fabricated successfully by a combination of embossing and thermal bonding processes. This project demonstrates the possibility of fabricating nanochannels with low cost and short processing time using polymer material. The processes are suitable not only for nanochannels but also for more complicated nanostructures. The presented technique allows the fabrication of nanodevices with various designs.

Multilayered film microreactors fabricated by a one-step thermal bonding technique with high reproducibility and their applications

Lab on a Chip ◽  
2016 ◽  
Vol 16 (6) ◽  
pp. 977-983 ◽  
Author(s):  
Kyoung-Ik Min ◽  
Jin-Oh Kim ◽  
Heejin Kim ◽  
Do Jin Im ◽  
Dong-Pyo Kim
Keyword(s):  
Three Dimensional ◽  
Multilayered Film ◽  
Thermal Bonding ◽  
High Reproducibility ◽  
Membrane Emulsification ◽  
Pressure Tolerance ◽  
One Step ◽  
Bonding Technique

We report the versatile uses of multilayered polyimide (PI) film microreactors with various functions including pressure tolerance, three-dimensional mixing and multistep membrane emulsification.

NANOPATTERNED POLYMER THIN FILMS

2005 ◽  
Vol 14 (03) ◽  
pp. 299-303
Author(s):  
CHUL-SIK KEE ◽  
KEUN BYUNG YOON ◽  
CHOON-GI CHOI ◽  
JIN-TAE KIM ◽  
SANG PIL HAN ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Polymer Film ◽  
Polymer Thin Films ◽  
Hot Embossing ◽  
Triangular Array ◽  
Average Radius ◽  
Average Depth ◽  
Two Dimensional

We fabricated polymer thin films with two-dimensional periodic nanopatterns using an imprinting technique with the hot embossing process. The silicon stamp employed in the imprinting has a triangular array of circular rods. The period of the array is 410 nm, and the radius and the height of a rod are 100 nm and 150 nm, respectively. The imprinting in the polymer film results in holes with the average radius of 105 nm and the average depth of 130 nm, which are close to the dimension of the stamp. The results show that the thermal imprinting process can be suitable for the implementation of nanopatterned polymer thin films. The interesting optical properties of the nanopatterned polymer thin films are also discussed.

Microfluidic chip fabrication using hot embossing and thermal bonding of COP

2009 ◽  
Vol 21 (7) ◽  
pp. 457-466 ◽  
Author(s):  
Boe-Yu Pemg ◽  
Chih-Wei Wu ◽  
Yung-Kang Shen ◽  
Yi Lin
Keyword(s):  
Microfluidic Chip ◽  
Hot Embossing ◽  
Thermal Bonding ◽  
Chip Fabrication
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