Effects of carbon on phosphorus diffusion in SiGe:C and the implications on phosphorus diffusion mechanisms
2020 ◽
Keyword(s):
2020 ◽
Keyword(s):
2001 ◽
Vol 194-199
◽
pp. 349-356
◽
Keyword(s):
2017 ◽
Vol 5
(11)
◽
pp. 5321-5331
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