Evaluating Mechanical Properties of Thin Layers using Nanoindentation and Finite-Element Modeling: Implanted Metals and Deposited Layers
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AbstractWe present a methodology based on finite-element modeling of nanoindentation data to extract reliable and accurate mechanical properties from thin, hard films and surface-modified layers on softer substrates. The method deduces the yield stress, Young's modulus, and hardness from indentations as deep as 50% of the layer thickness.
2004 ◽
Vol 19
(1)
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pp. 218-227
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2011 ◽
Vol 11
(9)
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pp. 1653-1657
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2021 ◽
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