A two-step load-deflection procedure applicable to extract the Young's modulus and the residual tensile stress of circularly shaped thin-film diaphragms
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2008 ◽
Vol 33-37
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pp. 969-974
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2005 ◽
Vol 54
(10)
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pp. 1016-1021
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2019 ◽
Vol 58
(SH)
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pp. SHHG01
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2003 ◽
Vol 2003.2
(0)
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pp. _OS06W0384-_OS06W0384
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