Al2O3/GeOx gate stack on germanium substrate fabricated by in situ cycling ozone oxidation method
2019 ◽
Vol 26
(1)
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pp. 221-229
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2011 ◽
Vol 65
(8)
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pp. 1188-1190
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Keyword(s):
2015 ◽
Vol 476
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pp. 554-560
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Keyword(s):