Photoacoustic elastic bending in thin film–substrate system: Experimental determination of the thin film parameters

2014 ◽  
Vol 116 (5) ◽  
pp. 053506 ◽  
Author(s):  
D. M. Todorović ◽  
M. D. Rabasović ◽  
D. D. Markushev ◽  
M. Sarajlić
Keyword(s):  
Thin Film ◽  
Experimental Determination ◽  
Elastic Bending ◽  
Film Substrate

Photoacoustic elastic bending in thin film—Substrate system

2013 ◽  
Vol 114 (21) ◽  
pp. 213510 ◽  
Author(s):  
D. M. Todorović ◽  
M. D. Rabasović ◽  
D. D. Markushev
Keyword(s):  
Thin Film ◽  
Elastic Bending ◽  
Film Substrate

Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators

2019 ◽  
Vol 126 (7) ◽  
pp. 075106 ◽  
Author(s):  
Nicolas Kurz ◽  
Anli Ding ◽  
Daniel F. Urban ◽  
Yuan Lu ◽  
Lutz Kirste ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Experimental Determination ◽  
Surface Acoustic Wave ◽  
Acoustic Properties ◽  
Acoustic Wave Resonators

Non-Contact Real-Time Evaluation of Polyimide Thin Film Thermoelastic Properties Through Impulsive Stimulated Thermal Scattering

1992 ◽  
Vol 284 ◽  
Author(s):  
J. A. Rogers ◽  
A. R. Duggal ◽  
K. A. Nelson
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Real Time ◽  
Viscoelastic Properties ◽  
Thermoelastic Properties ◽  
Substrate Adhesion ◽  
Thermal Scattering ◽  
Film Substrate ◽  
Time Evaluation

ABSTRACTWe demonstrate a new purely optical based method for the excitation and detection of acoustic and thermal disturbances in thin films. This technique is applied to the determination of the viscoelastic properties of unsupported and silicon supported polyimide thin (∼1 micron) films. We show how this technique can be used to detect film delaminations and suggest how it may be used to probe film-substrate adhesion quality.

Determination of elastic modulus of thin layers using nanoindentation

1997 ◽  
Vol 12 (9) ◽  
pp. 2475-2484 ◽  
Author(s):  
J. Menčík ◽  
D. Munz ◽  
E. Quandt ◽  
E. R. Weppelmann ◽  
M. V. Swain
Keyword(s):  
Thin Film ◽  
Experimental Data ◽  
Elastic Modulus ◽  
Linear Function ◽  
Thin Layers ◽  
Film Substrate ◽  
Comparison Of The Results ◽  
Practical Recommendations ◽  
Indentation Response

Elastic modulus of thin homogeneous films can be determined by indenting the specimen to various depths and extrapolating the measured (apparent) E-values to zero penetration. The paper shows the application of five approximation functions for this purpose: linear, exponential, reciprocal exponential, Gao's, and the Doerner and Nix functions. Comparison of the results for 26 film/substrate combinations has shown that the indentation response of film/substrate composites can, in general, be described by the Gao analytical function. In determining the thin film modulus from experimental data, satisfactory results can also be obtained with the exponential function, while linear function may be used only for thick films where the relative depths of penetration are small. The article explains the pertinent procedures and gives practical recommendations for the testing.

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