Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators

2019 ◽  
Vol 126 (7) ◽  
pp. 075106 ◽  
Author(s):  
Nicolas Kurz ◽  
Anli Ding ◽  
Daniel F. Urban ◽  
Yuan Lu ◽  
Lutz Kirste ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Experimental Determination ◽  
Surface Acoustic Wave ◽  
Acoustic Properties ◽  
Acoustic Wave Resonators

Experimental determination of the surface acoustic wave properties of new fine grain piezoelectric ceramics

1993 ◽  
Vol 74 (11) ◽  
pp. 6523-6529 ◽  
Author(s):  
G. Feuillard ◽  
M. Lethiecq ◽  
Y. Amazit ◽  
D. Certon ◽  
C. Millar ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Experimental Determination ◽  
Surface Acoustic Wave ◽  
Piezoelectric Ceramics ◽  
Fine Grain ◽  
Wave Properties

scholarly journals Inverse Determination of Coupling of Modes Parameters of Surface Acoustic Wave Resonators

2002 ◽  
Vol 41 (Part 1, No. 11A) ◽  
pp. 6610-6615 ◽  
Author(s):  
T.-T. Wu ◽  
S.-M. Wang ◽  
Y.-Y. Chen ◽  
T.-Y. Wu ◽  
P.-Z. Chang ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Resonators

Enhanced piezoelectric properties of aluminium doped zinc oxide thin film for surface acoustic wave resonators on a CMOS platform

2017 ◽  
Vol 28 (12) ◽  
pp. 9132-9138 ◽  
Author(s):  
Aliza Aini Md Ralib ◽  
Ossama Mortada ◽  
Jean Christophe Orlianges ◽  
Aurelian Crunteanu ◽  
Matthieu Chatras ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Piezoelectric Properties ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Acoustic Wave Resonators
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