Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching
2016 ◽
Vol 14
(5)
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pp. 052201-52205
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Keyword(s):
Keyword(s):
Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching
2014 ◽
Vol 289
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pp. 529-532
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Keyword(s):
Keyword(s):
Keyword(s):
Fabrication of Micro-Grooves in Silicon Carbide Using Femtosecond Laser Irradiation and Acid Etching
2014 ◽
Vol 31
(3)
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pp. 037901
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Keyword(s):
Keyword(s):