Spatially addressable design of gradient index structures through spatial light modulator based holographic lithography

2013 ◽  
Vol 114 (21) ◽  
pp. 213102 ◽  
Author(s):  
Kris Ohlinger ◽  
Jeff Lutkenhaus ◽  
Bayaner Arigong ◽  
Hualiang Zhang ◽  
Yuankun Lin
Keyword(s):  
Spatial Light Modulator ◽  
Holographic Lithography ◽  
Gradient Index ◽  
Index Structures ◽  
Light Modulator

Three-Dimensional Holographic Lithography Using a Spatial Light Modulator

2008 ◽  
Author(s):  
Nathan J. Jenness ◽  
Daniel G. Cole ◽  
Robert L. Clark
Keyword(s):  
Real Time ◽  
Spatial Light Modulator ◽  
Large Scale ◽  
Three Dimensional ◽  
Holographic Lithography ◽  
Layer By Layer ◽  
Direct Write ◽  
Light Modulator ◽  
Experimental Systems ◽  
Mechanical Stage

In this paper we present a lithographic process with the ability to automatically translate and arbitrarily position three-dimensional (3D) computer-generated patterns through the use of phase holograms. This method, dynamic maskless holographic lithography (DMHL), advances current photo-directed patterning and functionalization capabilities by expanding the capability to manipulate light in real-time without the use of expensive fixed masks. The system could be used for large-scale parallel manufacturing over larger areas and for point specific serial fabrication, interrogation, and metrology. The use of coherent illumination allows for the direct creation of 3D patterns of light for lithography as opposed to the mechanical stage, layer-by-layer 3D fabrication approach typical of direct-write systems. Extrinsic control over interfacial properties will provide a method for addressing aqueous phase bionanotechnolgy experimental systems in which detection, separation, transport, and handling are vital.

scholarly journals Digitally tunable holographic lithography using a spatial light modulator as a programmable phase mask

2013 ◽  
Vol 21 (22) ◽  
pp. 26227 ◽  
Author(s):  
J. Lutkenhaus ◽  
D. George ◽  
M. Moazzezi ◽  
U. Philipose ◽  
Y. Lin
Keyword(s):  
Spatial Light Modulator ◽  
Phase Mask ◽  
Holographic Lithography ◽  
Light Modulator
Sign in / Sign up

Export Citation Format

Share Document