Emittance of compact microwave ion source for low energy application

2014 ◽  
Vol 85 (2) ◽  
pp. 02A721 ◽  
Author(s):  
Yasuhito Gotoh ◽  
Shuhei Taguchi ◽  
Hiroshi Tsuji ◽  
Junzo Ishikawa ◽  
Shigeki Sakai
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
Microwave Ion Source ◽  
Energy Application

Development of compact microwave ion source for low-energy application

1998 ◽  
Vol 69 (2) ◽  
pp. 887-889 ◽  
Author(s):  
Y. Gotoh ◽  
Y. Fujimori ◽  
H. Kubo ◽  
H. Tsuji ◽  
J. Ishikawa
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
Microwave Ion Source ◽  
Energy Application

scholarly journals Compact microwave ion source for extremely low energy ion irradiation system

2000 ◽  
Vol 71 (2) ◽  
pp. 1160-1162 ◽  
Author(s):  
Y. Gotoh ◽  
H. Kubo ◽  
H. Tsuji ◽  
J. Ishikawa
Keyword(s):  
Ion Irradiation ◽  
Ion Source ◽  
Low Energy ◽  
Irradiation System ◽  
Microwave Ion Source

Optimization of Compact Microwave Ion Source for Generation of High Current and Low Energy Ion Beam

2011 ◽  
Author(s):  
Shuhei Taguchi ◽  
Yasuhito Gotoh ◽  
Hiroshi Tsuji ◽  
Shigeki Sakai ◽  
Junzo Ishikawa ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Source ◽  
Low Energy ◽  
High Current ◽  
Microwave Ion Source

scholarly journals Development of Ion Beam Assisted Deposition System Equipped with a Low Energy Compact Microwave Ion Source

Shinku ◽  
2003 ◽  
Vol 46 (9) ◽  
pp. 708-711
Author(s):  
Takeshi SHIBAHARA ◽  
Masayoshi ABIKO ◽  
Yasuhito GOTOH ◽  
Hiroshi TSUJI ◽  
Junzo ISHIKAWA
Keyword(s):  
Ion Beam ◽  
Ion Source ◽  
Low Energy ◽  
Ion Beam Assisted Deposition ◽  
Microwave Ion Source

scholarly journals Development of Compact Microwave Ion Source for the Purpose of Direct Extraction of Low Energy Ion Beams.

Shinku ◽  
1995 ◽  
Vol 38 (3) ◽  
pp. 156-159
Author(s):  
Yoshikazu FUJIMORI ◽  
Yasuhito GOTOH ◽  
Hiroshi TSUJI ◽  
Junzo ISHIKAWA
Keyword(s):  
Ion Beams ◽  
Ion Source ◽  
Low Energy ◽  
Direct Extraction ◽  
Microwave Ion Source

Development of microwave ion source for industrial applications

2014 ◽  
Vol 85 (2) ◽  
pp. 02C306 ◽  
Author(s):  
N. Takahashi ◽  
H. Murata ◽  
H. Mitsubori ◽  
J. Sakuraba ◽  
T. Soga ◽  
...  
Keyword(s):  
Industrial Applications ◽  
Ion Source ◽  
Microwave Ion Source

scholarly journals Development of new magnets for a microwave ion source

2018 ◽  
Author(s):  
Nobuaki Takahashi ◽  
Hirohiko Murata ◽  
Hitoshi Mitsubori ◽  
Tomohiro Soga ◽  
Yasushi Aoki ◽  
...  
Keyword(s):  
Ion Source ◽  
Microwave Ion Source
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