Development of microwave ion source for industrial applications

N. Takahashi; H. Murata; H. Mitsubori; J. Sakuraba; T. Soga; Y. Aoki; T. Katoh; Y. Saitoh; K. Yamada; N. Ikenaga; N. Sakudo

doi:10.1063/1.4826675

Development of microwave ion source for industrial applications

Review of Scientific Instruments ◽

10.1063/1.4826675 ◽

2014 ◽

Vol 85 (2) ◽

pp. 02C306 ◽

Cited By ~ 2

Author(s):

N. Takahashi ◽

H. Murata ◽

H. Mitsubori ◽

J. Sakuraba ◽

T. Soga ◽

...

Keyword(s):

Industrial Applications ◽

Ion Source ◽

Microwave Ion Source

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Compact microwave ion source for industrial applications

Review of Scientific Instruments ◽

10.1063/1.3673864 ◽

2012 ◽

Vol 83 (2) ◽

pp. 02B914 ◽

Cited By ~ 1

Author(s):

Yong-Sub Cho ◽

Dae-Il Kim ◽

Han-Sung Kim ◽

Kyung-Tae Seol ◽

Hyeok-Jung Kwon ◽

...

Keyword(s):

Industrial Applications ◽

Ion Source ◽

Microwave Ion Source

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Application of compact microwave ion source to low temperature growth of transition metal nitride thin films for vacuum microelectronics devices

Review of Scientific Instruments ◽

10.1063/1.1150372 ◽

2000 ◽

Vol 71 (2) ◽

pp. 1002-1005 ◽

Cited By ~ 9

Author(s):

Y. Gotoh ◽

H. Tsuji ◽

J. Ishikawa

Keyword(s):

Thin Films ◽

Low Temperature ◽

Transition Metal ◽

Ion Source ◽

Metal Nitride ◽

Temperature Growth ◽

Low Temperature Growth ◽

Transition Metal Nitride ◽

Vacuum Microelectronics ◽

Microwave Ion Source

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Modeling of gas-discharge chamber of the microwave ion source

2016 International Conference on Actual Problems of Electron Devices Engineering (APEDE) ◽

10.1109/apede.2016.7878912 ◽

2016 ◽

Author(s):

A. V. Prokopenko ◽

V. L. Shatokhin

Keyword(s):

Discharge Chamber ◽

Gas Discharge ◽

Ion Source ◽

Microwave Ion Source

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Development of new magnets for a microwave ion source

10.1063/1.5053389 ◽

2018 ◽

Author(s):

Nobuaki Takahashi ◽

Hirohiko Murata ◽

Hitoshi Mitsubori ◽

Tomohiro Soga ◽

Yasushi Aoki ◽

...

Keyword(s):

Ion Source ◽

Microwave Ion Source

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Minipermanent magnet high-current microwave ion source

Review of Scientific Instruments ◽

10.1063/1.2150807 ◽

2006 ◽

Vol 77 (3) ◽

pp. 03A305 ◽

Cited By ~ 16

Author(s):

Zhizhong Song ◽

Shixiang Peng ◽

Jinxiang Yu ◽

Jianchuan Ming ◽

Zhongxi Yuan ◽

...

Keyword(s):

Ion Source ◽

High Current ◽

Microwave Ion Source

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Ion Source Design for Industrial Applications

AIAA Journal ◽

10.2514/3.51131 ◽

1982 ◽

Vol 20 (6) ◽

pp. 745-760 ◽

Cited By ~ 43

Author(s):

Harold R. Kaufman ◽

Raymond S. Robinson

Keyword(s):

Industrial Applications ◽

Ion Source

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Extraction of a negative hydrogen ion beam from a microwave ion source

Fusion Engineering and Design ◽

10.1016/0920-3796(94)00216-t ◽

1995 ◽

Vol 26 (1-4) ◽

pp. 495-500 ◽

Cited By ~ 7

Author(s):

Kiyoshi Hashimoto ◽

Shiro Asano

Keyword(s):

Ion Beam ◽

Ion Source ◽

Hydrogen Ion ◽

Microwave Ion Source ◽

Negative Hydrogen Ion

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Development and test of 2.45 GHz microwave ion source based intense ion beam experimental facility

Vacuum ◽

10.1016/j.vacuum.2015.11.014 ◽

2016 ◽

Vol 124 ◽

pp. 55-59 ◽

Cited By ~ 4

Author(s):

Narender Kumar ◽

G. Rodrigues ◽

Y. Mathur ◽

S. Ojha ◽

R. Ahuja ◽

...

Keyword(s):

Ion Beam ◽

Ion Source ◽

Experimental Facility ◽

Microwave Ion Source

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Characteristics of a High Current Microwave Ion Source for Oxygen Ion Implanter.

Shinku ◽

10.3131/jvsj.42.670 ◽

1999 ◽

Vol 42 (7) ◽

pp. 670-675 ◽

Cited By ~ 1

Author(s):

Takayoshi SEKI ◽

Katsumi TOKIGUCHI

Keyword(s):

Ion Source ◽

High Current ◽

Oxygen Ion ◽

Microwave Ion Source

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Operational characteristic of a compact microwave ion source

Vacuum ◽

10.1016/0042-207x(86)90129-6 ◽

1986 ◽

Vol 36 (11-12) ◽

pp. 869-871 ◽

Cited By ~ 5

Author(s):

SR Walther ◽

KN Leung

Keyword(s):

Ion Source ◽

Operational Characteristic ◽

Microwave Ion Source

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