A two-axis in-plane motion measurement system based on optical beam deflection
2013 ◽
Vol 84
(10)
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pp. 105001
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2018 ◽
Vol 89
(3)
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pp. 035003
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2016 ◽
Vol 27
(2)
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pp. 025203
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2013 ◽
Vol 84
(8)
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pp. 083701
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2007 ◽
Vol 46
(8B)
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pp. 5636-5638
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2021 ◽
Vol 77
(2)
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pp. I_655-I_660
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1995 ◽
Vol 299
(3)
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pp. 333-336
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