Decoupling small-scale roughness and long-range features on deep reactive ion etched silicon surfaces
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1989 ◽
Vol 111
(2)
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pp. 112-120
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1999 ◽
Vol 17
(1)
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pp. 164-169
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2020 ◽
Vol 20
(5)
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pp. 3181-3190
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2019 ◽
Vol 27
(03)
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pp. 1950007
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2020 ◽
Vol 202
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pp. 104192
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2012 ◽
Vol 23
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pp. 835-851
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