Huge increase in gas phase nanoparticle generation by pulsed direct current sputtering in a reactive gas admixture

Oleksandr Polonskyi; Tilo Peter; Amir Mohammad Ahadi; Alexander Hinz; Thomas Strunskus; Vladimir Zaporojtchenko; Hynek Biederman; Franz Faupel

doi:10.1063/1.4816036

Huge increase in gas phase nanoparticle generation by pulsed direct current sputtering in a reactive gas admixture

Applied Physics Letters ◽

10.1063/1.4816036 ◽

2013 ◽

Vol 103 (3) ◽

pp. 033118 ◽

Cited By ~ 31

Author(s):

Oleksandr Polonskyi ◽

Tilo Peter ◽

Amir Mohammad Ahadi ◽

Alexander Hinz ◽

Thomas Strunskus ◽

...

Keyword(s):

Gas Phase ◽

Direct Current ◽

Pulsed Direct Current ◽

Direct Current Sputtering ◽

Nanoparticle Generation ◽

Reactive Gas

Download Full-text

Electrical resistivity change in Al:ZnO thin films dynamically deposited by bipolar pulsed direct-current sputtering and a remote plasma source

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3435326 ◽

2010 ◽

Vol 28 (4) ◽

pp. 856-860 ◽

Cited By ~ 3

Author(s):

Wonkyun Yang ◽

Junghoon Joo

Keyword(s):

Thin Films ◽

Electrical Resistivity ◽

Direct Current ◽

Plasma Source ◽

Resistivity Change ◽

Remote Plasma ◽

Pulsed Direct Current ◽

Direct Current Sputtering

Download Full-text

Mechanisms of the structural modification of Ti films by pulsed direct current and inductively coupled plasma-assisted pulsed direct current sputtering

Thin Solid Films ◽

10.1016/j.tsf.2017.05.014 ◽

2017 ◽

Vol 634 ◽

pp. 73-84 ◽

Cited By ~ 1

Author(s):

Eiji Kusano ◽

Naoto Kikuchi

Keyword(s):

Direct Current ◽

Inductively Coupled Plasma ◽

Structural Modification ◽

Inductively Coupled ◽

Pulsed Direct Current ◽

Direct Current Sputtering ◽

Ti Films

Download Full-text

Rapid thermal annealing effect on the spatial resistivity distribution of AZO thin films deposited by pulsed-direct-current sputtering for solar cells applications

Applied Surface Science ◽

10.1016/j.apsusc.2016.01.054 ◽

2016 ◽

Vol 366 ◽

pp. 53-58 ◽

Cited By ~ 16

Author(s):

Boubakeur Ayachi ◽

Thomas Aviles ◽

Jean-Pierre Vilcot ◽

Cathy Sion

Keyword(s):

Thin Films ◽

Solar Cells ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Direct Current ◽

Annealing Effect ◽

Pulsed Direct Current ◽

Direct Current Sputtering

Download Full-text

Development of the Pulsed Direct Current Iontophoresis and Its Clinical Application

PIERS Online ◽

10.2529/piers051008021701 ◽

2006 ◽

Vol 2 (2) ◽

pp. 157-162

Author(s):

Makio Akimoto ◽

Makoto Kawahara ◽

Mayumi Matsumoto ◽

Hidekazu Matsubayashi

Keyword(s):

Clinical Application ◽

Direct Current ◽

Pulsed Direct Current

Download Full-text

The growth of a multi-principal element (CoCrFeMnNi) oxynitride film by direct current magnetron sputtering using air as reactive gas

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2021.127433 ◽

2021 ◽

pp. 127433

Author(s):

G. Radnóczi ◽

R. Dedoncker ◽

G.Z. Radnóczi ◽

Zs. Czigány ◽

A. Sulyok ◽

...

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Principal Element ◽

Direct Current Magnetron Sputtering ◽

Oxynitride Film ◽

Reactive Gas

Download Full-text

Residual stresses in titanium nitride thin films deposited by direct current and pulsed direct current unbalanced magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2005.08.214 ◽

2006 ◽

Vol 494 (1-2) ◽

pp. 146-150 ◽

Cited By ~ 43

Author(s):

M. Benegra ◽

D.G. Lamas ◽

M.E. Fernández de Rapp ◽

N. Mingolo ◽

A.O. Kunrath ◽

...

Keyword(s):

Thin Films ◽

Residual Stresses ◽

Magnetron Sputtering ◽

Titanium Nitride ◽

Direct Current ◽

Unbalanced Magnetron Sputtering ◽

Unbalanced Magnetron ◽

Pulsed Direct Current

Download Full-text

Use of alternating and pulsed direct current electrified fields for zebra mussel control

Management of Biological Invasions ◽

10.3391/mbi.2017.8.3.05 ◽

2017 ◽

Vol 8 (3) ◽

pp. 311-324

Author(s):

James Luoma ◽

Jan Dean ◽

Todd Severson ◽

Jeremy Wise ◽

Matthew Barbour

Keyword(s):

Direct Current ◽

Zebra Mussel ◽

Pulsed Direct Current

Download Full-text

Self-Consistent Model for Pulsed Direct-Current N2Glow Discharge

Plasma Science and Technology ◽

10.1088/1009-0630/7/2/013 ◽

2005 ◽

Vol 7 (2) ◽

pp. 2745-2747 ◽

Cited By ~ 1

Author(s):

Liu Chengsen ◽

Wang Dezhen

Keyword(s):

Direct Current ◽

Consistent Model ◽

Self Consistent ◽

Pulsed Direct Current

Download Full-text

The Effect of Pulsed Direct Current Field on the Membrane Flux of a New Style of Membrane Bioreactor

Chemical Engineering & Technology ◽

10.1002/ceat.200600266 ◽

2007 ◽

Vol 30 (9) ◽

pp. 1262-1265 ◽

Cited By ~ 4

Author(s):

J.-P. Chen ◽

C.-Z. Yang ◽

J.-H. Zhou

Keyword(s):

Direct Current ◽

Membrane Bioreactor ◽

Current Field ◽

Membrane Flux ◽

Pulsed Direct Current

Download Full-text

Interplay between variable direct current sputtering deposition process parameters and properties of ZnO:Ga thin films

Thin Solid Films ◽

10.1016/j.tsf.2018.06.005 ◽

2018 ◽

Vol 660 ◽

pp. 538-545 ◽

Cited By ~ 8

Author(s):

Mohammad Tanvirul Ferdaous ◽

Seyed Ahmad Shahahmadi ◽

Megat Mohd Izhar Sapeli ◽

Puvaneswaran Chelvanathan ◽

Md. Akhtaruzzaman ◽

...

Keyword(s):

Thin Films ◽

Process Parameters ◽

Direct Current ◽

Deposition Process ◽

Sputtering Deposition ◽

Direct Current Sputtering

Download Full-text