scholarly journals Characterization of plasma chemistry and ion energy in cathodic arc plasma from Ti-Si cathodes of different compositions

2013 ◽  
Vol 113 (16) ◽  
pp. 163304 ◽  
Author(s):  
A. O. Eriksson ◽  
I. Zhirkov ◽  
M. Dahlqvist ◽  
J. Jensen ◽  
L. Hultman ◽  
...  
Keyword(s):  
Plasma Chemistry ◽  
Arc Plasma ◽  
Ion Energy ◽  
Cathodic Arc

Differentially evacuated ion energy analyzer for cathodic arc plasma

1996 ◽  
Vol 67 (6) ◽  
pp. 2415-2416
Author(s):  
Mamoru Sakaki ◽  
Tateki Sakakibara
Keyword(s):  
Arc Plasma ◽  
Energy Analyzer ◽  
Ion Energy ◽  
Cathodic Arc

Deposition and characterization of TiBCN films by cathodic arc plasma evaporation

2009 ◽  
Vol 517 (17) ◽  
pp. 5044-5049 ◽  
Author(s):  
Pi-Chuen Tsai ◽  
Wen-Jauh Chen ◽  
Jun-Hao Chen ◽  
Chi-Lung Chang
Keyword(s):  
Arc Plasma ◽  
Cathodic Arc

Characterization of Cr-doped TiO2 thin films prepared by cathodic arc plasma deposition

2007 ◽  
Vol 202 (4-7) ◽  
pp. 962-966 ◽  
Author(s):  
Mu-Hsuan Chan ◽  
Wei-Yu Ho ◽  
Da-Yung Wang ◽  
Fu-Hsing Lu
Keyword(s):  
Thin Films ◽  
Plasma Deposition ◽  
Arc Plasma ◽  
Tio2 Thin Films ◽  
Doped Tio2 ◽  
Cathodic Arc

Influence of Gas Entry Point on Plasma Chemistry, Ion Energy and Deposited Alumina Thin Films in Filtered Cathodic Arc

2007 ◽  
Vol 27 (5) ◽  
pp. 599-608 ◽  
Author(s):  
J. Rosen ◽  
P. O. Å. Persson ◽  
M. Ionescu ◽  
J. Pigott ◽  
D. R. McKenzie ◽  
...  
Keyword(s):  
Thin Films ◽  
Plasma Chemistry ◽  
Entry Point ◽  
Ion Energy ◽  
Cathodic Arc
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