Differentially evacuated ion energy analyzer for cathodic arc plasma

1996 ◽  
Vol 67 (6) ◽  
pp. 2415-2416
Author(s):  
Mamoru Sakaki ◽  
Tateki Sakakibara
Keyword(s):  
Arc Plasma ◽  
Energy Analyzer ◽  
Ion Energy ◽  
Cathodic Arc

scholarly journals Characterization of plasma chemistry and ion energy in cathodic arc plasma from Ti-Si cathodes of different compositions

2013 ◽  
Vol 113 (16) ◽  
pp. 163304 ◽  
Author(s):  
A. O. Eriksson ◽  
I. Zhirkov ◽  
M. Dahlqvist ◽  
J. Jensen ◽  
L. Hultman ◽  
...  
Keyword(s):  
Plasma Chemistry ◽  
Arc Plasma ◽  
Ion Energy ◽  
Cathodic Arc

Novel directional ion energy analyzer

1982 ◽  
Vol 53 (7) ◽  
pp. 1027-1031 ◽  
Author(s):  
R. L. Stenzel ◽  
R. Williams ◽  
R. Agüero ◽  
K. Kitazaki ◽  
A. Ling ◽  
...  
Keyword(s):  
Energy Analyzer ◽  
Ion Energy

The deposition and wear properties of cathodic arc plasma deposition TiAIN deposits

1996 ◽  
Vol 46 (1) ◽  
pp. 77-83 ◽  
Author(s):  
Kwang-Lung Lin ◽  
Ming-Yeong Hwang ◽  
Cheng-Dau Wu
Keyword(s):  
Plasma Deposition ◽  
Arc Plasma ◽  
Wear Properties ◽  
Cathodic Arc

PBII deposition of thick carbon coatings from a cathodic arc plasma

2002 ◽  
Vol 156 (1-3) ◽  
pp. 143-148 ◽  
Author(s):  
R.N Tarrant ◽  
N Fujisawa ◽  
M.V Swain ◽  
N.L James ◽  
D.R McKenzie ◽  
...  
Keyword(s):  
Arc Plasma ◽  
Carbon Coatings ◽  
Cathodic Arc
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