scholarly journals Thermomechanical noise measurement of polydimethylsiloxane microcantilevers fabricated by multilayer soft lithography

AIP Advances ◽  
2013 ◽  
Vol 3 (3) ◽  
pp. 032103
Author(s):  
Ting-Rong Yu ◽  
Ya-Tang Yang
Lab on a Chip ◽  
2014 ◽  
Vol 14 (19) ◽  
pp. 3790 ◽  
Author(s):  
Kosuke Iwai ◽  
Kuan Cheng Shih ◽  
Xiao Lin ◽  
Thomas A. Brubaker ◽  
Ryan D. Sochol ◽  
...  

2013 ◽  
Vol 1 (2) ◽  
Author(s):  
Aaron D. Mazzeo ◽  
David E. Hardt

This work describes the centrifugal casting and fast curing of double-sided, polydimethylsiloxane (PDMS)-based components with microfeatures. Centrifugal casting permits simultaneous patterning of multiple sides of a component and allows control of the thickness of the part in an enclosed mold without entrapment of bubbles. Spinning molds filled with PDMS at thousands of revolutions per minute for several minutes causes entrapped bubbles within the PDMS to migrate toward the axis of rotation or dissolve into solution. To cure the parts quickly (<10 min), active elements heat and cool cavities filled with PDMS after the completion of spinning. Microfluidic channels produced from the process have a low coefficient of variation (<2% for the height and width of channels measured in 20 parts). This process is also capable of molding functional channels in opposite sides of a part as demonstrated through a device with a system of valves typical to multilayer soft lithography.


Author(s):  
Bozhi Yang ◽  
Qiao Lin

This paper presents a novel latchable phase-change actuator that can potentially be used for flow valving and gating in portable lab-on-a-chip systems, where minimal energy consumption is required. The actuator exploits a low melting-point paraffin wax, whose solid-liquid phase changes allow the closing and opening of fluid flow through deformable microchannels. Flow switching is initiated by melting of paraffin, with an additional pneumatic pressure required for flow switching from open to closed state. After paraffin solidifies the switched state is subsequently maintained passively without further consumption of energy. The actuator can be fabricated from PDMS through the multilayer soft lithography technique. Testing results demonstrate that the actuator has a response time about 60-100 sec for flow switching, and can passively hold a microvalve closed under pressures up to 35 kPa.


2018 ◽  
Author(s):  
Andre Lai ◽  
Nicolas Altemose ◽  
Jonathan A. White ◽  
Aaron M. Streets

AbstractIntegrated elastomeric valves, also referred to as Quake valves, enable precise control and manipulation of fluid within microfluidic devices. Fabrication of such valves requires bonding of multiple layers of the silicone polymer polydimethylsiloxane (PDMS). The conventional method for PDMS-PDMS bonding is to use varied base to crosslinking agent ratios between layers, typically 20:1 and 5:1. This bonding technique, known as “off-ratio bonding,” provides strong, effective PDMS-PDMS bonding for multi-layer soft-lithography, but it can yield adverse PDMS material properties and can be wasteful of PDMS. Here we demonstrate the effectiveness of on-ratio PDMS bonding for multilayer soft lithography. We show the efficacy of this technique among common variants of PDMS: Sylgard 184, RTV 615, and Sylgard 182.


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