Interfacial study and energy-band alignment of annealed Al2O3 films prepared by atomic layer deposition on 4H-SiC
Keyword(s):
2015 ◽
Vol 8
(5)
◽
pp. 1493-1500
◽
Keyword(s):
Keyword(s):
2018 ◽
Vol 433
◽
pp. 530-534
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2019 ◽
Vol 37
(5)
◽
pp. 050903
2019 ◽
Vol 16
(6)
◽
pp. 1751-1756