Evaluation on residual stress in Bi3.15(Eu0.7Nd0.15)Ti3O12 polycrystalline ferroelectric thin film by using the orientation average method

2012 ◽  
Vol 101 (23) ◽  
pp. 231909 ◽  
Author(s):  
Y. Wei ◽  
H. B. Cheng ◽  
X. Y. Wang ◽  
X. J. Zheng
Keyword(s):  
Thin Film ◽  
Residual Stress ◽  
Average Method ◽  
Ferroelectric Thin Film ◽  
Orientation Average

Effect of Forming Gas on Properties of SrBi2Ta2O9 Ferroelectric Thin Film and Powder

2009 ◽  
Vol 24 (4) ◽  
pp. 737-740 ◽  
Author(s):  
Dong-Sheng WANG ◽  
Tao YU ◽  
An HU ◽  
Di WU ◽  
Ai-Dong LI ◽  
...  
Keyword(s):  
Thin Film ◽  
Ferroelectric Thin Film

Modeling the influence of the seeding layer on the transition behavior of a ferroelectric thin film

2011 ◽  
Vol 520 (1) ◽  
pp. 646-650 ◽  
Author(s):  
A. Oubelkacem ◽  
I. Essaoudi ◽  
A. Ainane ◽  
M. Saber ◽  
F. Dujardin
Keyword(s):  
Thin Film ◽  
Ferroelectric Thin Film ◽  
Seeding Layer ◽  
Transition Behavior

Substrate-induced mechanical and dielectric properties of a ferroelectric thin film

2002 ◽  
Vol 91 (8) ◽  
pp. 4973-4982 ◽  
Author(s):  
L. Lahoche ◽  
V. Lorman ◽  
S. B. Rochal ◽  
J. M. Roelandt
Keyword(s):  
Thin Film ◽  
Dielectric Properties ◽  
Ferroelectric Thin Film

Measurements of Residual Stress in the Layers of Thin Film Micro-Gas Sensors

2000 ◽  
Vol 657 ◽  
Author(s):  
Youngman Kim ◽  
Sung-Ho Choo
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Residual Stress ◽  
Gas Sensor ◽  
Gas Sensors ◽  
Micro Gas Sensor ◽  
Thin Film Layer ◽  
Film Layer ◽  
The Difference ◽  
Stress States

ABSTRACTThe mechanical properties of thin film materials are known to be different from those of bulk materials, which are generally overlooked in practice. The difference in mechanical properties can be misleading in the estimation of residual stress states in micro-gas sensors with multi-layer structures during manufacturing and in service.In this study the residual stress of each film layer in a micro-gas sensor was measured according to the five difference sets of film stacking structure used for the sensor. The Pt thin film layer was found to have the highest tensile residual stress, which may affect the reliability of the micro-gas sensor. For the Pt layer the changes in residual stress were measured as a function of processing variables and thermal cycling.

Investigation of the crossover properties for the interaction parameters of a ferroelectric thin film

2009 ◽  
Vol 149 (29-30) ◽  
pp. 1176-1179 ◽  
Author(s):  
Z.X. Lu ◽  
B.H. Teng ◽  
X.H. Lu ◽  
X.J. Zhang ◽  
C.D. Wang
Keyword(s):  
Thin Film ◽  
Ferroelectric Thin Film ◽  
Interaction Parameters
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