Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching
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2015 ◽
Vol 2
(3)
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pp. 92-105
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2016 ◽
Vol 675-676
◽
pp. 335-338
2014 ◽
2015 ◽
Vol 230
◽
pp. 111-116
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