Growth of continuous and ultrathin platinum films on tungsten adhesion layers using atomic layer deposition techniques

L. Baker; A. S. Cavanagh; J. Yin; S. M. George; A. Kongkanand; F. T. Wagner

doi:10.1063/1.4749819

Growth of continuous and ultrathin platinum films on tungsten adhesion layers using atomic layer deposition techniques

Applied Physics Letters ◽

10.1063/1.4749819 ◽

2012 ◽

Vol 101 (11) ◽

pp. 111601 ◽

Cited By ~ 36

Author(s):

L. Baker ◽

A. S. Cavanagh ◽

J. Yin ◽

S. M. George ◽

A. Kongkanand ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Deposition Techniques

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Evaluating Al2O3 gas diffusion barriers grown directly on Ca films using atomic layer deposition techniques

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4763360 ◽

2013 ◽

Vol 31 (1) ◽

pp. 01A122 ◽

Cited By ~ 25

Author(s):

Jacob A. Bertrand ◽

Steven M. George

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Gas Diffusion ◽

Diffusion Barriers ◽

Layer Deposition ◽

Deposition Techniques

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Nanolaminates with Novel Properties Fabricated Using Atomic Layer Deposition Techniques

10.21236/ada451599 ◽

2006 ◽

Author(s):

Steven M. George

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Deposition Techniques

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GaN Nanowire Functionalized with Atomic Layer Deposition Techniques for Enhanced Immobilization of Biomolecules

Langmuir ◽

10.1021/la103337a ◽

2010 ◽

Vol 26 (23) ◽

pp. 18382-18391 ◽

Cited By ~ 23

Author(s):

D. J. Guo ◽

A. I. Abdulagatov ◽

D. M. Rourke ◽

K. A. Bertness ◽

S. M. George ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Gan Nanowire ◽

Deposition Techniques

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Temperature effect during atomic layer deposition of zinc oxysulfide -Zn(O,S) buffer layers on Cu(In,Ga)(S,Se)2 synthesized by co-evaporation and electro-deposition techniques

2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC) ◽

10.1109/pvsc.2015.7356413 ◽

2015 ◽

Cited By ~ 1

Author(s):

C. Bugot ◽

C. Broussillou ◽

A. Sorba ◽

L. Parissi ◽

N. Schneider ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Temperature Effect ◽

Atomic Layer ◽

Buffer Layers ◽

Electro Deposition ◽

Layer Deposition ◽

Zinc Oxysulfide ◽

Deposition Techniques

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Determination of Trap Density in Hafnium Oxide Films Produced by Different Atomic Layer Deposition Techniques

ECS Meeting Abstracts ◽

10.1149/ma2017-02/14/847 ◽

2017 ◽

Keyword(s):

Atomic Layer Deposition ◽

Hafnium Oxide ◽

Oxide Films ◽

Atomic Layer ◽

Trap Density ◽

Layer Deposition ◽

Deposition Techniques

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Silver Nanoparticles Fabricated Using Chemical Vapor Deposition and Atomic Layer Deposition Techniques: Properties, Applications and Perspectives: Review

Noble and Precious Metals - Properties, Nanoscale Effects and Applications ◽

10.5772/intechopen.71571 ◽

2018 ◽

Cited By ~ 2

Author(s):

Piotr Piszczek ◽

Aleksandra Radtke

Keyword(s):

Silver Nanoparticles ◽

Chemical Vapor Deposition ◽

Atomic Layer Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Atomic Layer ◽

Layer Deposition ◽

Deposition Techniques

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Optimization and Structural Characterization of W/Al2O3Nanolaminates Grown Using Atomic Layer Deposition Techniques

Chemistry of Materials ◽

10.1021/cm050470y ◽

2005 ◽

Vol 17 (13) ◽

pp. 3475-3485 ◽

Cited By ~ 42

Author(s):

Z. A. Sechrist ◽

F. H. Fabreguette ◽

O. Heintz ◽

T. M. Phung ◽

D. C. Johnson ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Structural Characterization ◽

Atomic Layer ◽

Layer Deposition ◽

Deposition Techniques

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Fabrication and Properties of Organic-Inorganic Nanolaminates Using Molecular and Atomic Layer Deposition Techniques

10.21236/ada582180 ◽

2012 ◽

Author(s):

Steven M. George

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Deposition Techniques

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Properties of ZnO/Al[sub 2]O[sub 3] Alloy Films Grown Using Atomic Layer Deposition Techniques

Journal of The Electrochemical Society ◽

10.1149/1.1569481 ◽

2003 ◽

Vol 150 (6) ◽

pp. G339 ◽

Cited By ~ 113

Author(s):

J. W. Elam ◽

D. Routkevitch ◽

S. M. George

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Alloy Films ◽

Layer Deposition ◽

Deposition Techniques

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Determination of trap density in hafnia films produced by two atomic layer deposition techniques

Microelectronic Engineering ◽

10.1016/j.mee.2017.05.004 ◽

2017 ◽

Vol 178 ◽

pp. 104-107 ◽

Cited By ~ 2

Author(s):

D.R. Islamov ◽

V.A. Gritsenko ◽

M.S. Lebedev

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Trap Density ◽

Layer Deposition ◽

Deposition Techniques

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