Optimization and Structural Characterization of W/Al2O3Nanolaminates Grown Using Atomic Layer Deposition Techniques
2017 ◽
Vol 20
(5)
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pp. 1179-1184
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2014 ◽
Vol 29
(8)
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pp. 085006
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Keyword(s):
2010 ◽
Vol 204
(12-13)
◽
pp. 2015-2018
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2011 ◽
Vol 26
(11)
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pp. 115005
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Keyword(s):
2021 ◽
Vol 1762
(1)
◽
pp. 012041
Keyword(s):