Low temperature plasma synthesis of photoluminescent nanocrystalline silicon-nitride

Environmental stability and cryogenic thermal cycling of low-temperature plasma-deposited silicon nitride thin films

Journal of Applied Physics ◽

10.1063/1.2179969 ◽

2006 ◽

Vol 99 (5) ◽

pp. 053519 ◽

Cited By ~ 13

Author(s):

M. Martyniuk ◽

J. Antoszewski ◽

C. A. Musca ◽

J. M. Dell ◽

L. Faraone

Keyword(s):

Thin Films ◽

Silicon Nitride ◽

Low Temperature ◽

Thermal Cycling ◽

Environmental Stability ◽

Low Temperature Plasma ◽

Temperature Plasma

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Low temperature plasma deposition of silicon nitride to produce ultra-reliable, high performance, low cost sealed chip-on-board (SCOB) assemblies

IEEE Transactions on Components Packaging and Manufacturing Technology Part A ◽

10.1109/95.465139 ◽

1995 ◽

Vol 18 (3) ◽

pp. 471-477 ◽

Cited By ~ 7

Author(s):

R.M. Kubacki

Keyword(s):

Silicon Nitride ◽

Low Temperature ◽

High Performance ◽

Plasma Deposition ◽

Low Cost ◽

Low Temperature Plasma ◽

Temperature Plasma

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ChemInform Abstract: Low-Temperature Plasma Synthesis of Carbon Nanotubes and Graphene Based Materials and Their Fuel Cell Applications

ChemInform ◽

10.1002/chin.201405223 ◽

2014 ◽

Vol 45 (5) ◽

pp. no-no

Author(s):

Qi Wang ◽

Xiangke Wang ◽

Zhifang Chai ◽

Wenping Hu

Keyword(s):

Carbon Nanotubes ◽

Fuel Cell ◽

Low Temperature ◽

Plasma Synthesis ◽

Low Temperature Plasma ◽

Temperature Plasma ◽

Synthesis Of Carbon Nanotubes

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Low temperature plasma deposition of silicon nitride from silane and nitrogen plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581424 ◽

1998 ◽

Vol 16 (5) ◽

pp. 2794-2803 ◽

Cited By ~ 56

Author(s):

Bengi F. Hanyaloglu ◽

Eray S. Aydil

Keyword(s):

Silicon Nitride ◽

Low Temperature ◽

Plasma Deposition ◽

Low Temperature Plasma ◽

Temperature Plasma ◽

Nitrogen Plasmas

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Low temperature plasma deposition of silicon nitride to produce ultra-reliable, high performance, low cost Sealed Chip-on-Board (SCOB) assemblies

Proceedings of 16th IEEE/CPMT International Electronic Manufacturing Technology Symposium ◽

10.1109/iemt.1994.404718 ◽

2002 ◽

Cited By ~ 2

Author(s):

R.M. Kubacki

Keyword(s):

Silicon Nitride ◽

Low Temperature ◽

High Performance ◽

Plasma Deposition ◽

Low Cost ◽

Low Temperature Plasma ◽

Temperature Plasma

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Low temperature plasma synthesis of mesoporous Fe3O4 nanorods grafted on reduced graphene oxide for high performance lithium storage

Nanoscale ◽

10.1039/c3nr05423c ◽

2014 ◽

Vol 6 (4) ◽

pp. 2286 ◽

Cited By ~ 80

Author(s):

Quan Zhou ◽

Zongbin Zhao ◽

Zhiyu Wang ◽

Yanfeng Dong ◽

Xuzhen Wang ◽

...

Keyword(s):

Graphene Oxide ◽

Low Temperature ◽

Reduced Graphene Oxide ◽

High Performance ◽

Plasma Synthesis ◽

Low Temperature Plasma ◽

Lithium Storage ◽

Temperature Plasma ◽

Reduced Graphene

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Radio frequency magnetron sputtering of Au and low temperature plasma enhanced chemical vapor deposition of silicon nitride for ring ultramicroelectrodes fabrication

Journal of Electroanalytical Chemistry ◽

10.1016/j.jelechem.2006.07.030 ◽

2006 ◽

Vol 596 (2) ◽

pp. 124-130 ◽

Cited By ~ 1

Author(s):

Mingzhi Zhu ◽

Zhuangde Jiang ◽

Weixuan Jing ◽

Biao Yang

Keyword(s):

Chemical Vapor Deposition ◽

Silicon Nitride ◽

Low Temperature ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Temperature Plasma ◽

Radio Frequency Magnetron Sputtering ◽

Temperature Plasma

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Low temperature plasma production of hydrogenated nanocrystalline silicon thin films

Current Applied Physics ◽

10.1016/j.cap.2012.07.001 ◽

2013 ◽

Vol 13 (1) ◽

pp. 181-188 ◽

Cited By ~ 7

Author(s):

Tamila Anutgan ◽

Sema Uysal

Keyword(s):

Thin Films ◽

Low Temperature ◽

Nanocrystalline Silicon ◽

Low Temperature Plasma ◽

Temperature Plasma ◽

Plasma Production ◽

Silicon Thin Films

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Low-temperature plasma synthesis of carbon nanotubes and graphene based materials and their fuel cell applications

Chemical Society Reviews ◽

10.1039/c3cs60205b ◽

2013 ◽

Vol 42 (23) ◽

pp. 8821 ◽

Cited By ~ 121

Author(s):

Qi Wang ◽

Xiangke Wang ◽

Zhifang Chai ◽

Wenping Hu

Keyword(s):

Carbon Nanotubes ◽

Fuel Cell ◽

Low Temperature ◽

Plasma Synthesis ◽

Low Temperature Plasma ◽

Temperature Plasma ◽

Synthesis Of Carbon Nanotubes

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Nanostructural Characteristics and Mechanical Properties of Low Temperature Plasma Enhanced Chemical Vapor Deposited Silicon Nitride Thin Films

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2009.ns59 ◽

2009 ◽

Vol 9 (6) ◽

pp. 3734-3741 ◽

Cited By ~ 6

Author(s):

H. Huang ◽

J. M. Dell ◽

S. Liu

Keyword(s):

Thin Films ◽

Mechanical Properties ◽

Silicon Nitride ◽

Low Temperature ◽

Chemical Vapor ◽

Low Temperature Plasma ◽

Temperature Plasma ◽

Chemical Vapor Deposited

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