Structure of nitrogenated carbon films prepared from acetylene and nitrogen mixture in electron cyclotron resonance plasma

Somnath Bhattacharyya; C. Vallée; C. Cardinaud; G. Turban

doi:10.1063/1.373018

Structure of nitrogenated carbon films prepared from acetylene and nitrogen mixture in electron cyclotron resonance plasma

Journal of Applied Physics ◽

10.1063/1.373018 ◽

2000 ◽

Vol 87 (10) ◽

pp. 7524-7532 ◽

Cited By ~ 9

Author(s):

Somnath Bhattacharyya ◽

C. Vallée ◽

C. Cardinaud ◽

G. Turban

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Nitrogen Mixture ◽

Resonance Plasma ◽

Nitrogenated Carbon

Download Full-text

Dissociative Excitation of C2H2 in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2Δ) Radicals and Formation of Hydrogenated Amorphous Carbon Films

Plasma Chemistry and Plasma Processing ◽

10.1007/s11090-012-9355-2 ◽

2012 ◽

Vol 32 (2) ◽

pp. 231-248 ◽

Cited By ~ 4

Author(s):

Haruhiko Ito ◽

Katsuaki Koshimura ◽

Saori Onitsuka ◽

Kohtaro Okada ◽

Tsuneo Suzuki ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Dissociative Excitation ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Resonance Plasma

Download Full-text

Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantation

Acta Physica Sinica ◽

10.7498/aps.54.3241 ◽

2005 ◽

Vol 54 (7) ◽

pp. 3241

Author(s):

Gao Peng ◽

Xu Jun ◽

Deng Xin-Lu ◽

Wang De-He ◽

Dong Chuang

Keyword(s):

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Source Ion Implantation ◽

Resonance Plasma

Download Full-text

Solid Solubility of Nitrogen in Amorphous Carbon Films Deposited in Electron Cyclotron Resonance Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.4983 ◽

1998 ◽

Vol 37 (Part 1, No. 9A) ◽

pp. 4983-4988 ◽

Cited By ~ 21

Author(s):

Hidetoshi Saitoh ◽

Tohru Inoue ◽

Shigeo Ohshio

Keyword(s):

Amorphous Carbon ◽

Solid Solubility ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Resonance Plasma

Download Full-text

Preparation of nitrogen containing carbon films using chemical vapor deposition enhanced by electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.115442 ◽

1995 ◽

Vol 67 (3) ◽

pp. 353-355 ◽

Cited By ~ 31

Author(s):

Tohru Inoue ◽

Shigeo Ohshio ◽

Hidetoshi Saitoh ◽

Kiichiro Kamata

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

Relative Irradiance Measurement and Bonding Configurations of Amorphous Fluorinated Carbon Films Deposited by Electron Cyclotron Resonance Plasma

Plasma Science and Technology ◽

10.1088/1009-0630/2/5/008 ◽

2000 ◽

Vol 2 (5) ◽

pp. 469-474 ◽

Cited By ~ 2

Author(s):

Ye Chao ◽

Kang Jian ◽

Ning Zhao-yuan ◽

Cheng Shan-hua

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Irradiance Measurement ◽

Fluorinated Carbon ◽

Resonance Plasma

Download Full-text

Hard-hydrogenated tetrahedral amorphous carbon films by distributed electron cyclotron resonance plasma

International Journal of Refractory Metals and Hard Materials ◽

10.1016/j.ijrmhm.2005.07.004 ◽

2006 ◽

Vol 24 (1-2) ◽

pp. 39-48 ◽

Cited By ~ 12

Author(s):

F. Piazza

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon ◽

Resonance Plasma

Download Full-text

Effect of the hydrogen on the intrinsic stress in hydrogenated amorphous carbon films deposited from an electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.122726 ◽

1998 ◽

Vol 73 (22) ◽

pp. 3226-3228 ◽

Cited By ~ 29

Author(s):

B. Racine ◽

M. Benlahsen ◽

K. Zellama ◽

P. Goudeau ◽

M. Zarrabian ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Intrinsic Stress ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Resonance Plasma

Download Full-text

Observation of nanocrystalline diamond in diamondlike carbon films deposited at room temperature in electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.118912 ◽

1997 ◽

Vol 70 (19) ◽

pp. 2535-2537 ◽

Cited By ~ 68

Author(s):

M. Zarrabian ◽

N. Fourches-Coulon ◽

G. Turban ◽

C. Marhic ◽

M. Lancin

Keyword(s):

Cyclotron Resonance ◽

Room Temperature ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Nanocrystalline Diamond ◽

Electron Cyclotron Resonance Plasma ◽

Diamondlike Carbon ◽

Resonance Plasma

Download Full-text

The subimplantation model for hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma

Materials Science in Semiconductor Processing ◽

10.1016/s1369-8001(00)00097-4 ◽

2001 ◽

Vol 4 (1-3) ◽

pp. 213-215

Author(s):

O. Durand-Drouhin ◽

M. Lejeune ◽

R. Bouzerar ◽

M. Benlahsen

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous Carbon ◽

Hydrogenated Amorphous ◽

Resonance Plasma

Download Full-text

Hydrogen-free diamond-like carbon films prepared by microwave electron cyclotron resonance plasma-enhanced direct current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.07.067 ◽

2010 ◽

Vol 519 (1) ◽

pp. 86-90 ◽

Cited By ~ 10

Author(s):

Lili Ru ◽

Jianjun Huang ◽

Liang Gao ◽

Bing Qi

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Direct Current Magnetron Sputtering ◽

Resonance Plasma

Download Full-text