Observation of nanocrystalline diamond in diamondlike carbon films deposited at room temperature in electron cyclotron resonance plasma

M. Zarrabian; N. Fourches-Coulon; G. Turban; C. Marhic; M. Lancin

doi:10.1063/1.118912

Observation of nanocrystalline diamond in diamondlike carbon films deposited at room temperature in electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.118912 ◽

1997 ◽

Vol 70 (19) ◽

pp. 2535-2537 ◽

Cited By ~ 68

Author(s):

M. Zarrabian ◽

N. Fourches-Coulon ◽

G. Turban ◽

C. Marhic ◽

M. Lancin

Keyword(s):

Cyclotron Resonance ◽

Room Temperature ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Nanocrystalline Diamond ◽

Electron Cyclotron Resonance Plasma ◽

Diamondlike Carbon ◽

Resonance Plasma

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Super‐wide electron cyclotron resonance plasma source excited by traveling microwave as an efficient tool for diamondlike carbon film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579302 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1241-1243

Author(s):

A. Ishii ◽

S. Amadatsu ◽

S. Minomo ◽

M. Taniguchi ◽

M. Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Efficient Tool ◽

Electron Cyclotron Resonance Plasma ◽

Diamondlike Carbon ◽

Resonance Plasma

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Dissociative Excitation of C2H2 in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2Δ) Radicals and Formation of Hydrogenated Amorphous Carbon Films

Plasma Chemistry and Plasma Processing ◽

10.1007/s11090-012-9355-2 ◽

2012 ◽

Vol 32 (2) ◽

pp. 231-248 ◽

Cited By ~ 4

Author(s):

Haruhiko Ito ◽

Katsuaki Koshimura ◽

Saori Onitsuka ◽

Kohtaro Okada ◽

Tsuneo Suzuki ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Dissociative Excitation ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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Highly homogeneous silica coatings for optical and protective applications deposited by PECVD at room temperature in a planar uniform distributed electron cyclotron resonance plasma reactor.

Thin Solid Films ◽

10.1016/0040-6090(96)80068-x ◽

1995 ◽

Vol 270 (1-2) ◽

pp. 49-54 ◽

Cited By ~ 12

Author(s):

J.C. Rostaing ◽

F. Coeuret ◽

J. Pelletier ◽

T. Lagarde ◽

R. Etemadi

Keyword(s):

Cyclotron Resonance ◽

Room Temperature ◽

Electron Cyclotron Resonance ◽

Plasma Reactor ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Silica Coatings ◽

Resonance Plasma

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Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantation

Acta Physica Sinica ◽

10.7498/aps.54.3241 ◽

2005 ◽

Vol 54 (7) ◽

pp. 3241

Author(s):

Gao Peng ◽

Xu Jun ◽

Deng Xin-Lu ◽

Wang De-He ◽

Dong Chuang

Keyword(s):

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Source Ion Implantation ◽

Resonance Plasma

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Properties of a-SiN x .: H films deposited at room temperature by the electron cyclotron resonance plasma method

Philosophical Magazine B ◽

10.1080/13642819608239130 ◽

1996 ◽

Vol 73 (3) ◽

pp. 487-502 ◽

Cited By ~ 24

Author(s):

S. Garcia ◽

J. M. Martin ◽

M. Fernandez ◽

I. Martil ◽

G. Gonzalez-diaz

Keyword(s):

Cyclotron Resonance ◽

Room Temperature ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Method ◽

Resonance Plasma

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Solid Solubility of Nitrogen in Amorphous Carbon Films Deposited in Electron Cyclotron Resonance Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.4983 ◽

1998 ◽

Vol 37 (Part 1, No. 9A) ◽

pp. 4983-4988 ◽

Cited By ~ 21

Author(s):

Hidetoshi Saitoh ◽

Tohru Inoue ◽

Shigeo Ohshio

Keyword(s):

Amorphous Carbon ◽

Solid Solubility ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Resonance Plasma

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Preparation of nitrogen containing carbon films using chemical vapor deposition enhanced by electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.115442 ◽

1995 ◽

Vol 67 (3) ◽

pp. 353-355 ◽

Cited By ~ 31

Author(s):

Tohru Inoue ◽

Shigeo Ohshio ◽

Hidetoshi Saitoh ◽

Kiichiro Kamata

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Relative Irradiance Measurement and Bonding Configurations of Amorphous Fluorinated Carbon Films Deposited by Electron Cyclotron Resonance Plasma

Plasma Science and Technology ◽

10.1088/1009-0630/2/5/008 ◽

2000 ◽

Vol 2 (5) ◽

pp. 469-474 ◽

Cited By ~ 2

Author(s):

Ye Chao ◽

Kang Jian ◽

Ning Zhao-yuan ◽

Cheng Shan-hua

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Irradiance Measurement ◽

Fluorinated Carbon ◽

Resonance Plasma

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Hard-hydrogenated tetrahedral amorphous carbon films by distributed electron cyclotron resonance plasma

International Journal of Refractory Metals and Hard Materials ◽

10.1016/j.ijrmhm.2005.07.004 ◽

2006 ◽

Vol 24 (1-2) ◽

pp. 39-48 ◽

Cited By ~ 12

Author(s):

F. Piazza

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon ◽

Resonance Plasma

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Effect of the hydrogen on the intrinsic stress in hydrogenated amorphous carbon films deposited from an electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.122726 ◽

1998 ◽

Vol 73 (22) ◽

pp. 3226-3228 ◽

Cited By ~ 29

Author(s):

B. Racine ◽

M. Benlahsen ◽

K. Zellama ◽

P. Goudeau ◽

M. Zarrabian ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Intrinsic Stress ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Resonance Plasma

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