Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantation

Gao Peng;  Xu Jun;  Deng Xin-Lu;  Wang De-He;  Dong Chuang

doi:10.7498/aps.54.3241

Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantation

Acta Physica Sinica ◽

10.7498/aps.54.3241 ◽

2005 ◽

Vol 54 (7) ◽

pp. 3241

Author(s):

Gao Peng ◽

Xu Jun ◽

Deng Xin-Lu ◽

Wang De-He ◽

Dong Chuang

Keyword(s):

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Source Ion Implantation ◽

Resonance Plasma

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Preparation of Diamond-Like carbon Films in methane by Electron Cyclotron Resonance Microwave Plasma Source Ion Implantation

Chinese Physics Letters ◽

10.1088/0256-307x/20/5/329 ◽

2003 ◽

Vol 20 (5) ◽

pp. 692-695 ◽

Cited By ~ 10

Author(s):

Li Xin ◽

Tang Zhen-An ◽

Ma Guo-Ja ◽

Wu Zhi-Meng ◽

Deng Xin-Lu

Keyword(s):

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Plasma Source ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Plasma Source Ion Implantation ◽

Resonance Microwave

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Tribological modification of aluminum by electron-cyclotron resonance plasma source ion implantation

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581717 ◽

1999 ◽

Vol 17 (4) ◽

pp. 1996-2000 ◽

Cited By ~ 7

Author(s):

D. Popovici ◽

M. Bolduc ◽

B. Terreault ◽

A. H. Sarkissian ◽

B. L. Stansfield ◽

...

Keyword(s):

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Source Ion Implantation ◽

Resonance Plasma

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Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.l802 ◽

1993 ◽

Vol 32 (Part 2, No. 6A) ◽

pp. L802-L805 ◽

Cited By ~ 3

Author(s):

Akira Ishii ◽

Yoshiyuki Sakaguchi ◽

Shoichiro Minomo ◽

Michio Taniguchi ◽

Masato Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Diamond Like Carbon Film ◽

Resonance Plasma

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Nitrogen and oxygen ion implantation of aluminum using an electron cyclotron resonance plasma source

10.1117/12.321947 ◽

1998 ◽

Cited By ~ 1

Author(s):

Dan Popovici ◽

Bernard Terreault ◽

Andranik H. Sarkissian ◽

R. W. Paynter ◽

Guy G. Ross ◽

...

Keyword(s):

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Oxygen Ion ◽

Oxygen Ion Implantation ◽

Resonance Plasma

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Synthesis of a-C thin films by plasma-based ion implantation using an electron cyclotron resonance plasma source with a mirror field

Surface and Coatings Technology ◽

10.1016/s0257-8972(03)00036-7 ◽

2003 ◽

Vol 169-170 ◽

pp. 266-269

Author(s):

Toshiya Watanabe ◽

Kazuhiro Yamamoto ◽

Osamu Tsuda ◽

Yoshinori Koga ◽

Akihiro Tanaka

Keyword(s):

Thin Films ◽

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Development of Plasma Based Ion Implantation System using an Electron Cyclotron Resonance Plasma Source with a Mirror Field and Synthesis of Carbon Thin Films

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.4684 ◽

2001 ◽

Vol 40 (Part 1, No. 7) ◽

pp. 4684-4690 ◽

Cited By ~ 12

Author(s):

Toshiya Watanabe ◽

Kazuhiro Yamamoto ◽

Yoshinori Koga ◽

Akihiro Tanaka

Keyword(s):

Thin Films ◽

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Carbon Thin Films ◽

Resonance Plasma

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Hydrogen-free diamond-like carbon films prepared by microwave electron cyclotron resonance plasma-enhanced direct current magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.07.067 ◽

2010 ◽

Vol 519 (1) ◽

pp. 86-90 ◽

Cited By ~ 10

Author(s):

Lili Ru ◽

Jianjun Huang ◽

Liang Gao ◽

Bing Qi

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Direct Current Magnetron Sputtering ◽

Resonance Plasma

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Distributed electron cyclotron resonance plasma immersion for large area ion implantation (invited)

Review of Scientific Instruments ◽

10.1063/1.1148530 ◽

1998 ◽

Vol 69 (2) ◽

pp. 831-836 ◽

Cited By ~ 19

Author(s):

F. Le Coeur ◽

T. Lagarde ◽

J. Pelletier ◽

Y. Arnal ◽

R. Burke ◽

...

Keyword(s):

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Large Area ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Electron cyclotron resonance plasma source for conductive film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579309 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1281-1286 ◽

Cited By ~ 31

Author(s):

Toshiro Ono ◽

Hiroshi Nishimura ◽

Masaru Shimada ◽

Seitaro Matsuo

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Electron Cyclotron Resonance Plasma ◽

Conductive Film ◽

Resonance Plasma

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Electrical Characterisation of Gate Dielectrics Deposited with Multipolar Electron Cyclotron Resonance Plasma Source

30th European Solid-State Device Research Conference ◽

10.1109/essderc.2000.194805 ◽

2000 ◽

Author(s):

G.I. Isai ◽

A.Y. Kovalgin ◽

J. Holleman ◽

P.H. Woerlee ◽

H. Wallinga ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Gate Dielectrics ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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