The conversion of isolated oxygen atoms to a fast diffusing species in Czochralski silicon at low temperatures

1999 ◽  
Vol 86 (4) ◽  
pp. 1878-1887 ◽  
Author(s):  
S. A. McQuaid ◽  
B. K. Johnson ◽  
D. Gambaro ◽  
R. Falster ◽  
M. J. Ashwin ◽  
...  
Keyword(s):  
Low Temperatures ◽  
Czochralski Silicon ◽  
Oxygen Atoms

Out Diffusion of Oxygen in Czochralski Silicon at Low Temperatures

1998 ◽  
Vol 527 ◽  
Author(s):  
S.A. McQuaid ◽  
B.K. Johnson ◽  
D. Gambaro ◽  
R. Falster ◽  
M. Ashwin ◽  
...  
Keyword(s):  
Low Temperatures ◽  
Conversion Rate ◽  
Catalytic Mechanism ◽  
Diffusion Rate ◽  
Hydrogen Plasma ◽  
Surface Concentration ◽  
Czochralski Silicon ◽  
Simultaneous Loss ◽  
Diffusion Profiles ◽  
Oxygen Atoms

ABSTRACTPreviously reported measurements of anomalously high rates of oxygen out-diffusion in Czochralski silicon at low temperatures (T≤450°C) are confirmed. The surface concentration is shown to decrease with increasing time while the depth to which the concentration is depleted remains constant. Exposure to a hydrogen plasma under conditions known to catalyse the diffusion of isolated oxygen atoms causes an increased rate of decrease of the surface concentration without significantly affecting the depth to which the concentration is depleted. The evolution of the out-diffusion profiles cannot be explained by a catalytic mechanism operating on the isolated oxygen atoms. A slow conversion of Oi to a complex containing oxygen which can diffuse rapidly over long distances before being trapped either on the surface or in the bulk of the sample can account for both out-diffusion and simultaneous loss of [Oi] in the bulk. The conversion rate is enhanced by exposure to a hydrogen plasma, indicating that it is controlled by the diffusion rate of isolated atoms.

Understanding Reactivity at Very Low Temperatures: The Reactions of Oxygen Atoms with Alkenes

Science ◽  
2007 ◽  
Vol 317 (5834) ◽  
pp. 102-105 ◽  
Author(s):  
H. Sabbah ◽  
L. Biennier ◽  
I. R. Sims ◽  
Y. Georgievskii ◽  
S. J. Klippenstein ◽  
...  
Keyword(s):  
Low Temperatures ◽  
Oxygen Atoms

A study of chromium-exchanged zeolites as potential catalysts for thermolysis of water

1986 ◽  
Vol 64 (7) ◽  
pp. 1332-1339 ◽  
Author(s):  
K. M. Miedzinska ◽  
B. R. Hollebone
Keyword(s):  
Low Temperatures ◽  
Metal Ion ◽  
Redox Cycle ◽  
Zeolite 13X ◽  
Irreversible Reduction ◽  
Very High ◽  
Oxygen Atoms

Evidence was found that the Cr(III)/Cr(II) redox cycle previously described to occur upon dehydration and rehydration of exchanged zeolite 13X, does not occur reversibly. Data suggest dimerization of the metal ion at high levels of exchange. The bridging provideu by the oxygen atoms of the lattice probably stabilize these dimers and lead to initial but irreversible reduction at very low temperatures. Evidence also indicates irreversible formation of new lattices at very high dehydration temperatures.

scholarly journals Effect of ramping from low temperatures on oxygen precipitation in Czochralski silicon

2008 ◽  
Vol 57 (2) ◽  
pp. 1037
Author(s):  
Cui Can ◽  
Ma Xiang-Yang ◽  
Yang De-Ren
Keyword(s):  
Low Temperatures ◽  
Czochralski Silicon ◽  
Oxygen Precipitation
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