Resistivity and oxygen content of indium tin oxide films deposited at room temperature by pulsed-laser ablation

1999 ◽  
Vol 86 (2) ◽  
pp. 991-994 ◽  
Author(s):  
Y. Wu ◽  
C. H. M. Marée ◽  
R. F. Haglund ◽  
J. D. Hamilton ◽  
M. A. Morales Paliza ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Oxygen Content ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Room Temperature ◽  
Oxide Films ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Tin Oxide Films

Reactive pulsed laser ablation and deposition of thin indium tin oxide films for solid state compact sensors

1999 ◽  
Vol 138-139 ◽  
pp. 522-526 ◽  
Author(s):  
R. Teghil ◽  
V. Marotta ◽  
A.Giardini Guidoni ◽  
T.M. Di Palma ◽  
C. Flamini
Keyword(s):  
Laser Ablation ◽  
Solid State ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Films ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Tin Oxide Films

Pulsed Laser Deposition of Crystalline Indium Tin Oxide Films at Room Temperature by Substrate Laser Irradiation

2000 ◽  
Vol 39 (Part 2, No. 4B) ◽  
pp. L377-L379 ◽  
Author(s):  
Frederick O. Adurodija ◽  
Hirokazu Izumi ◽  
Tsuguo Ishihara ◽  
Hideki Yoshioka ◽  
Muneyuki Motoyama ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Laser Irradiation ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Room Temperature ◽  
Oxide Films ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Tin Oxide Films

Effect of laser irradiation on the properties of indium tin oxide films deposited at room temperature by pulsed laser deposition

Vacuum ◽  
2002 ◽  
Vol 67 (2) ◽  
pp. 209-216 ◽  
Author(s):  
F.O Adurodija ◽  
H Izumi ◽  
T Ishihara ◽  
H Yoshioka ◽  
M Motoyama ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Laser Irradiation ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Room Temperature ◽  
Oxide Films ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Tin Oxide Films
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