Investigation of substrate-dependent nucleation of plasma-deposited microcrystalline silicon on glass and silicon substrates using atomic force microscopy
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2012 ◽
Vol 358
(17)
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pp. 2082-2085
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2011 ◽
Vol 5
(10-11)
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pp. 373-375
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2012 ◽
Vol 258
(22)
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pp. 8689-8695
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2000 ◽
Vol 266-269
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pp. 309-314
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2002 ◽
Vol 235
(1-4)
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pp. 411-414
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