scholarly journals Improved amorphous/crystalline silicon interface passivation by hydrogen plasma treatment

2011 ◽  
Vol 99 (12) ◽  
pp. 123506 ◽  
Author(s):  
A. Descoeudres ◽  
L. Barraud ◽  
Stefaan De Wolf ◽  
B. Strahm ◽  
D. Lachenal ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Crystalline Silicon ◽  
Hydrogen Plasma ◽  
Interface Passivation ◽  
Silicon Interface

Improvement of crystalline silicon surface passivation by hydrogen plasma treatment

2004 ◽  
Vol 84 (9) ◽  
pp. 1474-1476 ◽  
Author(s):  
I. Martı́n ◽  
M. Vetter ◽  
A. Orpella ◽  
C. Voz ◽  
J. Puigdollers ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Hydrogen Plasma ◽  
Silicon Surface Passivation

scholarly journals Formation of electronic defects in crystalline silicon during hydrogen plasma treatment

AIP Advances ◽  
2019 ◽  
Vol 9 (4) ◽  
pp. 045110 ◽  
Author(s):  
Shota Nunomura ◽  
Isao Sakata ◽  
Koji Matsubara
Keyword(s):  
Plasma Treatment ◽  
Crystalline Silicon ◽  
Hydrogen Plasma ◽  
Electronic Defects

Annealing induced amorphous/crystalline silicon interface passivation by hydrogen atom diffusion

2015 ◽  
Vol 27 (1) ◽  
pp. 705-710 ◽  
Author(s):  
Xiaowan Dai ◽  
Hongkun Cai ◽  
Dexian Zhang ◽  
Guifeng Chen ◽  
Yong Wang ◽  
...  
Keyword(s):  
Hydrogen Atom ◽  
Crystalline Silicon ◽  
Atom Diffusion ◽  
Interface Passivation ◽  
Silicon Interface

scholarly journals The silane depletion fraction as an indicator for the amorphous/crystalline silicon interface passivation quality

2010 ◽  
Vol 97 (18) ◽  
pp. 183505 ◽  
Author(s):  
A. Descoeudres ◽  
L. Barraud ◽  
R. Bartlome ◽  
G. Choong ◽  
Stefaan De Wolf ◽  
...  
Keyword(s):  
Crystalline Silicon ◽  
Interface Passivation ◽  
Silicon Interface
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