Phosphorus ion implantation and annealing induced n-type conductivity and microstructure evolution in ultrananocrystalline diamond films
2013 ◽
Vol 30
(8)
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pp. 088102
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2015 ◽
Vol 54
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pp. 47-54
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2009 ◽
Vol 42
(10)
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pp. 105403
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2014 ◽
Vol 6
(7)
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pp. 4911-4919
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