Effects of ambient gas pressure on (1−x) SrTiO3‐xBaTiO3films prepared by pulsed laser deposition

1996 ◽  
Vol 80 (9) ◽  
pp. 4984-4989 ◽  
Author(s):  
Tzu‐Feng Tseng ◽  
Ming‐Hua Yeh ◽  
Kuo‐Shung Liu ◽  
I‐Nan Lin
2009 ◽  
Vol 255 (8) ◽  
pp. 4372-4377 ◽  
Author(s):  
J.J. Lin ◽  
L.S. Loh ◽  
P. Lee ◽  
T.L. Tan ◽  
S.V. Springham ◽  
...  

2000 ◽  
Vol 655 ◽  
Author(s):  
Masanori Okuyama ◽  
Toshiyuki Nakaiso ◽  
Minoru Noda

AbstractSr2(Ta1划x, Nbx)2O7(STN) ferroelectric thin films have been prepared on SiO2/Si(100) substrates by the pulsed laser deposition (PLD) method. Preferential (110) and (151)-oriented STN thin films are deposited at a low temperature of 600°C in N2O ambient gas at 0.08 Torr. A counterclockwise C-V hysteresis was observed in the metal-ferroelectric-insulator-semiconductor (MFIS) structure using Sr2(Ta0.7, Nb0.3)2O7 on SiO2/Si deposited at 600°C. Memory window in the C-V curve spreads symmetrically towards both positive and negative directions when applied voltage increases and the window does not change in sweep rates ranging from 0.1 to 4.0×103 V/s. The C-V curve of the MFIS structure does not degrade after 1010 cycles of polarization reversal. The gate retention time is about 3.0×103 sec when the voltages and time of write pulse are ±15V and 1.0 sec, respectively, and hold bias was -0.5 V.


2001 ◽  
Vol 10 (3-7) ◽  
pp. 900-904 ◽  
Author(s):  
Kenji Ebihara ◽  
Toshiyuki Nakamiya ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Shin-ichi Aoqui

1995 ◽  
Vol 397 ◽  
Author(s):  
M. Tyunin

ABSTRACTFilm growth in pulsed laser deposition (PLD) is described as a process of sorption of ablated species on the substrate surface. Film growth rate and composition are qualitatively analyzed as a function of laser fluence and ambient gas pressure. As an example, analysis of the film composition is carried out for BiSrCaCuO and PbZrTiO pulsed laser deposited films.


1998 ◽  
Vol 37 (Part 1, No. 5A) ◽  
pp. 2629-2633 ◽  
Author(s):  
Tae Yeong Koo ◽  
Ki-Bong Lee ◽  
Yoon-Hee Jeong ◽  
Kwang Yong Kang

Sign in / Sign up

Export Citation Format

Share Document