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scholarly journals Study of Latex sphere mask dry etching in oxygen

2020 ◽  
Vol 1697 ◽  
pp. 012192
Author(s):  
I A Morozov ◽  
K A Vyacheslavova ◽  
A S Gudovskikh ◽  
A V Uvarov ◽  
A I Baranov ◽  
...  
Keyword(s):  
Dry Etching ◽  
Latex Sphere

scholarly journals The Study of Latex Sphere Lithography for High Aspect Ratio Dry Silicon Etching

2020 ◽  
Vol 217 (4) ◽  
pp. 2070017
Author(s):  
Ivan Morozov ◽  
Alexander Gudovskikh ◽  
Alexander Uvarov ◽  
Artem Baranov ◽  
Vladimir Sivakov ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Silicon Etching ◽  
Latex Sphere

The Study of Latex Sphere Lithography for High Aspect Ratio Dry Silicon Etching

2019 ◽  
Vol 217 (4) ◽  
pp. 1900535 ◽  
Author(s):  
Ivan Morozov ◽  
Alexander Gudovskikh ◽  
Alexander Uvarov ◽  
Artem Baranov ◽  
Vladimir Sivakov ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Silicon Etching ◽  
Latex Sphere

Morphology and topography analysis of mesoporous titania templated by micrometric latex sphere arrays

2012 ◽  
Vol 152 ◽  
pp. 84-95 ◽  
Author(s):  
D.A. Barros Filho ◽  
J.E. Benedetti ◽  
M.A. Pereira-da-Silva ◽  
V. Seriacopi ◽  
W.R. Gomes Silva ◽  
...  
Keyword(s):  
Mesoporous Titania ◽  
Latex Sphere ◽  
Topography Analysis

Phase-modulated Mueller ellipsometry characterization of scattering by latex sphere suspensions

2000 ◽  
Vol 39 (4) ◽  
pp. 629 ◽  
Author(s):  
Bernard Kaplan ◽  
Eric Compain ◽  
Bernard Drevillon
Keyword(s):  
Latex Sphere ◽  
Sphere Suspensions

Nebulisation of monodisperse latex sphere suspensions in air jet and ultrasonic nebulisers

1996 ◽  
Vol 133 (1-2) ◽  
pp. 203-214 ◽  
Author(s):  
Orla N.M. Mc Callion ◽  
Kevin M.G. Taylor ◽  
Marian Thomas ◽  
Anthony J. Taylor
Keyword(s):  
Air Jet ◽  
Latex Sphere ◽  
Sphere Suspensions
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