Annealing behavior and atomic composition of substitutional carbon–oxygen complexes in silicon crystals

1996 ◽  
Vol 80 (7) ◽  
pp. 4199-4201 ◽  
Author(s):  
Yoshimi Shirakawa ◽  
Hiroshi Yamada‐Kaneta
1977 ◽  
Vol 16 (2) ◽  
pp. 367-368 ◽  
Author(s):  
Tomokuni Mitsuishi ◽  
Yoshisato Sasaki ◽  
Hiroshi Asami

Author(s):  
Е.А. Толкачева ◽  
В.П. Маркевич ◽  
Л.И. Мурин

AbstractThe processes of the formation and annealing of V_ n O_ m ( n , m ≥ 2) vacancy–oxygen complexes in Czochralski silicon crystals irradiated with fast electrons and reactor neutrons have been studied by infrared absorption Fourier spectroscopy. A number of arguments are presented in favor of identification of absorption bands at 829.3 and 844.2 cm^–1 as being related to local vibrational modes of V_2O_2 and V_3O_2 complexes, respectively.


2016 ◽  
Vol 7 (2) ◽  
pp. 192-195
Author(s):  
L. I. Murin ◽  
V. A. Gurinovich ◽  
I. F. Medvedeva ◽  
V. P. Markevich

1986 ◽  
Vol 25 (Part 2, No. 10) ◽  
pp. L859-L861 ◽  
Author(s):  
Masashi Suezawa ◽  
Koji Sumino ◽  
Hirofumi Harada ◽  
Takao Abe

2013 ◽  
Vol 205-206 ◽  
pp. 171-180 ◽  
Author(s):  
Vasilii Gusakov

In the framework of a unified approach the diffusion coefficient (the prefactor and activation barrier) of an interstitial oxygen Oi, the hydrogen molecule H2, vacancy, oxygen dimer in silicon crystals and Oiin Si1-xGexsolid solutions, silicon nanotubes and nanowires has been calculated. For all the above cases, the calculated values of the diffusion coefficient are in good agreement with the experimental data. The calculated equilibrium structures, electrical activity, the vibrational spectrum, the mechanism of diffusion of oxygen dimer fully describe the experimental results. Our study has revealed that the diffusivity of impurities (defects) in alloys can decrease considerably and this variation results from the fact that the prefactor depends on the concentration of component elements of the alloy.


2015 ◽  
Vol 52 (5) ◽  
pp. 68-75
Author(s):  
A. J. Janavičius ◽  
A. Mekys ◽  
R. Purlys ◽  
Ž. Norgėla ◽  
S. Daugėla ◽  
...  

Abstract The soft X-ray photons absorbed in the inner K, L, M shells of Si atoms produce photoelectrons and Auger electrons, thus generating vacancies, interstitials and metastable oxygen complexes. The samples of Czochralski silicon crystals covered with 0.1 μm thickness layer of carbon have been irradiated by X-rays using different voltages of Cu anode of the Russian diffractometer DRON-3M. The influence of X-rays on the formation of point defects and vacancy complexes, and their dynamics in Cz-Si crystals have been studied by infrared absorption. We have measured and calculated dynamics of concentration of carbon and interstitial oxygen using FTIR spectroscopy at room temperature after irradiation by soft X-rays. Using transmittance measurements and nonlinear diffusion theory we have calculated densities increasing for substitutional carbon and interstitial oxygen by reactions and very fast diffusion. The superdiffusion coefficients of carbon in silicon at room temperature generated by X-rays are about hundred thousand times greater than diffusion coefficients obtained for thermodiffusion.


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