Early Stages of Oxygen Precipitation in Silicon
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9789401066457, 9789400903555

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Copper and Oxygen Precipitation During Thermal Oxidation of Silicon: A Tem and Ebic Study

Early Stages of Oxygen Precipitation in Silicon ◽

10.1007/978-94-009-0355-5_23 ◽

1996 ◽

pp. 363-369

Author(s):

A. Correia ◽

D. Ballutaud ◽

A. Boutry-Forveille

Keyword(s):

Thermal Oxidation ◽

Oxygen Precipitation

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Oxygen Precipitation in MCZ Silicon: Behaviour and Dependence on the Origin of Raw Material and Growth Conditions

Early Stages of Oxygen Precipitation in Silicon ◽

10.1007/978-94-009-0355-5_43 ◽

1996 ◽

pp. 517-525

Author(s):

T. M. Tkacheva ◽

G. N. Petrov ◽

K. L. Enisherlova ◽

N. A. Iasamanov

Keyword(s):

Growth Conditions ◽

Raw Material ◽

Oxygen Precipitation

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Magnetic Resonance Investigations of Thermal Donors in Silicon

Early Stages of Oxygen Precipitation in Silicon ◽

10.1007/978-94-009-0355-5_4 ◽

1996 ◽

pp. 61-82 ◽

Cited By ~ 4

Author(s):

C. A. J. Ammerlaan ◽

I. S. Zevenbergen ◽

Yu. V. Martynov ◽

T. Gregorkiewicz

Keyword(s):

Magnetic Resonance

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Atomic Composition, Structure and Vibrational Excitation of Substitutional Carbon-Oxygen Complexes in Silicon

Early Stages of Oxygen Precipitation in Silicon ◽

10.1007/978-94-009-0355-5_26 ◽

1996 ◽

pp. 389-396 ◽

Cited By ~ 5

Author(s):

H. Yamada-Kaneta ◽

Y. Shirakawa ◽

C. Kaneta

Keyword(s):

Vibrational Excitation ◽

Atomic Composition ◽

Composition Structure ◽

Oxygen Complexes

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Complexes of Oxygen and Group II Impurities in Silicon

Early Stages of Oxygen Precipitation in Silicon ◽

10.1007/978-94-009-0355-5_22 ◽

1996 ◽

pp. 355-362

Author(s):

E. McGlynn ◽

M. O. Henry ◽

S. E. Daly ◽

K. G. McGuigan

Keyword(s):

Group Ii

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Oxygen-Related Luminescence Centres Created in Czochralski Silicon

Early Stages of Oxygen Precipitation in Silicon ◽

10.1007/978-94-009-0355-5_17 ◽

1996 ◽

pp. 303-318 ◽

Cited By ~ 3

Author(s):

E. C. Lightowlers ◽

Gordon Davies

Keyword(s):

Czochralski Silicon

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Various Forms of Isolated Oxygen in Semiconductors

Early Stages of Oxygen Precipitation in Silicon ◽

10.1007/978-94-009-0355-5_16 ◽

1996 ◽

pp. 283-302 ◽

Cited By ~ 3

Author(s):

B. Pajot

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Low-Temperature Diffusion and Agglomeration of Oxygen in Silicon

Early Stages of Oxygen Precipitation in Silicon ◽

10.1007/978-94-009-0355-5_14 ◽

1996 ◽

pp. 243-261 ◽

Cited By ~ 2

Author(s):

U. Gösele ◽

E. Schroer ◽

P. Werner ◽

T. Y. Tan

Keyword(s):

Low Temperature ◽

Temperature Diffusion

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Generation of Thermal Donors, Nitrogen-Oxygen Complexes and Hydrogen-Oxygen Complexes in Silicon

Early Stages of Oxygen Precipitation in Silicon ◽

10.1007/978-94-009-0355-5_12 ◽

1996 ◽

pp. 207-221

Author(s):

M. Suezawa

Keyword(s):

Oxygen Complexes

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On the Impact of Grown-in Silicon Oxide Precipitate Nuclei on Silicon Gate Oxide Integrity

Early Stages of Oxygen Precipitation in Silicon ◽

10.1007/978-94-009-0355-5_40 ◽

1996 ◽

pp. 493-500 ◽

Cited By ~ 2

Author(s):

J. Vanhellemont ◽

G. Kissinger ◽

K. Kenis ◽

M. Depas ◽

D. Gräf ◽

...

Keyword(s):

Silicon Oxide ◽

Gate Oxide ◽

The Impact ◽

Oxide Precipitate ◽

Gate Oxide Integrity

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