Electron Cyclotron Resonance Microwave Discharge for Oxide Deposition Using Tetraethoxysilane

C. S. Pai; J. F. Miner; P. D. Foo

doi:10.1149/1.2069315

Electron Cyclotron Resonance Microwave Discharge for Oxide Deposition Using Tetraethoxysilane

Journal of The Electrochemical Society ◽

10.1149/1.2069315 ◽

1992 ◽

Vol 139 (3) ◽

pp. 850-856 ◽

Cited By ~ 16

Author(s):

C. S. Pai ◽

J. F. Miner ◽

P. D. Foo

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Electron Cyclotron ◽

Oxide Deposition ◽

Resonance Microwave

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Electron cyclotron resonance microwave discharge for oxide deposition using tetramethylcyclotetrasiloxane

Journal of Applied Physics ◽

10.1063/1.354074 ◽

1993 ◽

Vol 73 (7) ◽

pp. 3531-3538 ◽

Cited By ~ 6

Author(s):

C. S. Pai ◽

J. F. Miner ◽

P. D. Foo

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Electron Cyclotron ◽

Oxide Deposition ◽

Resonance Microwave

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Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge sustained by circular TM11mode fields

Journal of Applied Physics ◽

10.1063/1.363033 ◽

1996 ◽

Vol 80 (4) ◽

pp. 2512-2514 ◽

Cited By ~ 2

Author(s):

S. C. Kuo ◽

S. P. Kuo

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Electron Cyclotron ◽

Resonance Microwave

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Formation of CN x thin films by reactive pulsed laser deposition assisted by electron cyclotron resonance microwave discharge

Applied Physics A ◽

10.1007/s003390100806 ◽

2001 ◽

Vol 73 (5) ◽

pp. 605-608 ◽

Cited By ~ 8

Author(s):

W. Shi ◽

J.D. Wu ◽

J. Sun ◽

H. Ling ◽

Z.F. Ying ◽

...

Keyword(s):

Thin Films ◽

Pulsed Laser Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Pulsed Laser ◽

Electron Cyclotron ◽

Laser Deposition ◽

Resonance Microwave

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High excitation of the species in nitrogen–aluminum plasma generated by electron cyclotron resonance microwave discharge of N2 gas and pulsed laser ablation of Al target

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/j.sab.2014.09.007 ◽

2014 ◽

Vol 101 ◽

pp. 226-233 ◽

Cited By ~ 4

Author(s):

Peipei Liang ◽

Yanli Li ◽

Hua Cai ◽

Qinghu You ◽

Xu Yang ◽

...

Keyword(s):

Laser Ablation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Pulsed Laser ◽

Pulsed Laser Ablation ◽

Electron Cyclotron ◽

High Excitation ◽

Aluminum Plasma ◽

Resonance Microwave

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Electromagnetic particle simulation of electron cyclotron resonance microwave discharge

Journal of Applied Physics ◽

10.1063/1.352825 ◽

1993 ◽

Vol 73 (9) ◽

pp. 4205-4211 ◽

Cited By ~ 13

Author(s):

Wook Hee Koh ◽

Nak Heon Choi ◽

Duk In Choi ◽

Yong Ho Oh

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Electron Cyclotron ◽

Particle Simulation ◽

Resonance Microwave

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Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge

International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.1993.593406 ◽

1993 ◽

Author(s):

S.C. Kuo ◽

E.E. Kunhardt ◽

S.P. Kuo

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Discharge ◽

Electron Cyclotron ◽

Resonance Microwave

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Energy Distribution Functions of Ions Impacted on a Negatively Biased Substrate in an Electron Cyclotron Resonance Microwave Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.4393 ◽

1999 ◽

Vol 38 (Part 1, No. 7B) ◽

pp. 4393-4396 ◽

Cited By ~ 3

Author(s):

Yasunori Ohtsu ◽

Keiichi Mori ◽

Hiroharu Fujita

Keyword(s):

Energy Distribution ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Distribution Functions ◽

Electron Cyclotron ◽

Energy Distribution Functions ◽

Resonance Microwave

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Determining the number of chemical steps responsible, for the distribution of molecular species within an electron cyclotron resonance-microwave plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580699 ◽

1997 ◽

Vol 15 (3) ◽

pp. 647-653 ◽

Cited By ~ 6

Author(s):

S. F. Webb ◽

G. A. Gaddy ◽

Rik Blumenthal

Keyword(s):

Molecular Species ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Electron Cyclotron ◽

Resonance Microwave

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Kinetic modeling of microscopic processes during electron cyclotron resonance microwave plasma‐assisted molecular beam epitaxial growth of GaN/GaAs‐based heterostructures

Applied Physics Letters ◽

10.1063/1.115682 ◽

1996 ◽

Vol 68 (11) ◽

pp. 1510-1512 ◽

Cited By ~ 20

Author(s):

Z. Z. Bandić ◽

R. J. Hauenstein ◽

M. L. O’Steen ◽

T. C. McGill

Keyword(s):

Epitaxial Growth ◽

Kinetic Modeling ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Electron Cyclotron ◽

Molecular Beam Epitaxial ◽

Molecular Beam Epitaxial Growth ◽

Resonance Microwave

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New high‐rate sputtering‐type electron cyclotron resonance microwave plasma using an electric mirror

Applied Physics Letters ◽

10.1063/1.101310 ◽

1989 ◽

Vol 54 (17) ◽

pp. 1645-1647 ◽

Cited By ~ 13

Author(s):

Morito Matsuoka ◽

Ken’ichi Ono

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Electron Cyclotron ◽

High Rate ◽

Resonance Microwave

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