A three‐dimensional model for inductively coupled plasma etching reactors: Azimuthal symmetry, coil properties, and comparison to experiments

1996 ◽  
Vol 80 (3) ◽  
pp. 1337-1344 ◽  
Author(s):  
Mark J. Kushner ◽  
Wenli Z. Collison ◽  
Michael J. Grapperhaus ◽  
John P. Holland ◽  
Michael S. Barnes
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Three Dimensional ◽  
Dimensional Model ◽  
Three Dimensional Model ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled ◽  
Azimuthal Symmetry

The morphologies and optical properties of three-dimensional GaN nano-cone arrays

RSC Advances ◽  
2016 ◽  
Vol 6 (49) ◽  
pp. 43272-43277 ◽  
Author(s):  
Haotian Wang ◽  
Guangmei Zhai ◽  
Lin Shang ◽  
Shufang Ma ◽  
Wei Jia ◽  
...  
Keyword(s):  
Optical Properties ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Three Dimensional ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Three-dimensional GaN nanostructures with well-aligned nano-cones were fabricated via laser interference lithography + inductively coupled plasma etching techniques.

Inductively coupled plasma etching for delineation of InAs/GaSb pixels

2012 ◽  
Author(s):  
Jean Nguyen ◽  
John Gill ◽  
Sir B. Rafol ◽  
Alexander Soibel ◽  
Arezou Khoshakhlagh ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Inductively coupled plasma etching of HgCdTe using a CH4-based mixture

2005 ◽  
Vol 34 (6) ◽  
pp. 740-745 ◽  
Author(s):  
E. Laffosse ◽  
J. Baylet ◽  
J. P. Chamonal ◽  
G. Destefanis ◽  
G. Cartry ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Fabrication of GaN nanorods by inductively coupled plasma etching via SiO2 nanosphere lithography

2009 ◽  
Vol 517 (14) ◽  
pp. 3859-3861 ◽  
Author(s):  
Byung-Jae Kim ◽  
Hyunjung Jung ◽  
Hong-Yeol Kim ◽  
Joona Bang ◽  
Jihyun Kim
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Nanosphere Lithography ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Factors Affecting the Top Stripping of GaAs Microwire Array Fabricated by Inductively Coupled Plasma Etching

2015 ◽  
Vol 32 (5) ◽  
pp. 058102 ◽  
Author(s):  
Ying Cheng ◽  
Ji-Jun Zou ◽  
Ming Wan ◽  
Wei-Lu Wang ◽  
Xin-Cun Peng ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Factors Affecting ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled
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