Highest transmittance and high-mobility amorphous indium gallium zinc oxide films on flexible substrate by room-temperature deposition and post-deposition anneals

2011 ◽  
Vol 99 (5) ◽  
pp. 051901 ◽  
Author(s):  
Mandar J. Gadre ◽  
T. L. Alford
Keyword(s):  
Zinc Oxide ◽  
Room Temperature ◽  
Flexible Substrate ◽  
Oxide Films ◽  
High Mobility ◽  
Indium Gallium Zinc Oxide ◽  
Zinc Oxide Films ◽  
Temperature Deposition ◽  
Indium Gallium ◽  
Post Deposition

Crystallization behavior of amorphous indium–gallium–zinc-oxide films and its effects on thin-film transistor performance

2016 ◽  
Vol 55 (3) ◽  
pp. 035504 ◽  
Author(s):  
Ayaka Suko ◽  
JunJun Jia ◽  
Shin-ichi Nakamura ◽  
Emi Kawashima ◽  
Futoshi Utsuno ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Crystallization Behavior ◽  
Thin Film Transistor ◽  
Oxide Films ◽  
Indium Gallium Zinc Oxide ◽  
Zinc Oxide Films ◽  
Indium Gallium

RF Sputtered Low-Resistivity and High-Transmittance Indium Gallium Zinc Oxide Films for Near-UV Applications

2011 ◽  
Vol 14 (3) ◽  
pp. H132 ◽  
Author(s):  
Heng-Jui Chang ◽  
Kuo-Ming Huang ◽  
Shang-Fu Chen ◽  
Tze-Hsuan Huang ◽  
Meng-Chyi Wu
Keyword(s):  
Zinc Oxide ◽  
Oxide Films ◽  
Indium Gallium Zinc Oxide ◽  
Low Resistivity ◽  
Zinc Oxide Films ◽  
Indium Gallium

Surface reactivity and oxygen migration in amorphous indium-gallium-zinc oxide films annealed in humid atmosphere

2013 ◽  
Vol 103 (20) ◽  
pp. 201904 ◽  
Author(s):  
Ken Watanabe ◽  
Dong-Hee Lee ◽  
Isao Sakaguchi ◽  
Kenji Nomura ◽  
Toshio Kamiya ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Oxide Films ◽  
Surface Reactivity ◽  
Indium Gallium Zinc Oxide ◽  
Humid Atmosphere ◽  
Zinc Oxide Films ◽  
Oxygen Migration ◽  
Indium Gallium

Room Temperature Deposition of Indium Zinc Oxide Films on PES Substrate by LF Magnetron Sputtering

2007 ◽  
Vol 51 (2) ◽  
pp. 589-593 ◽  
Author(s):  
Eun Lyoung Kim ◽  
Sang Kooun Jung ◽  
Choong Soo Kim ◽  
Duck Kyu Park ◽  
Ho-Young Cho ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Oxide Films ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide ◽  
Temperature Deposition

scholarly journals Activation of sputter-processed indium–gallium–zinc oxide films by simultaneous ultraviolet and thermal treatments

2016 ◽  
Vol 6 (1) ◽  
Author(s):  
Young Jun Tak ◽  
Byung Du Ahn ◽  
Sung Pyo Park ◽  
Si Joon Kim ◽  
Ae Ran Song ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Oxide Films ◽  
Thermal Treatments ◽  
Indium Gallium Zinc Oxide ◽  
Zinc Oxide Films ◽  
Indium Gallium

Low-Resistivity and High-Transmittance Indium Gallium Zinc Oxide Films Prepared by Co-Sputtering In2Ga2ZnO7 and In2O3 Targets

2019 ◽  
Vol 28 (4) ◽  
pp. 137-148 ◽  
Author(s):  
Heng-Jui Chang ◽  
Kuo-Ming Huang ◽  
Chen-Hsien Chu ◽  
Shang-Fu Chen ◽  
Tze H. Huang ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Oxide Films ◽  
Indium Gallium Zinc Oxide ◽  
Low Resistivity ◽  
Zinc Oxide Films ◽  
Indium Gallium
Sign in / Sign up

Export Citation Format

Share Document