Comparison of the electrical and optical properties of direct current and radio frequency sputtered amorphous indium gallium zinc oxide films

2013 ◽  
Vol 527 ◽  
pp. 21-25 ◽  
Author(s):  
Jianke Yao ◽  
Li Gong ◽  
Lei Xie ◽  
Shengdong Zhang
Keyword(s):  
Zinc Oxide ◽  
Optical Properties ◽  
Radio Frequency ◽  
Direct Current ◽  
Oxide Films ◽  
Indium Gallium Zinc Oxide ◽  
Electrical And Optical Properties ◽  
Zinc Oxide Films ◽  
Indium Gallium

Electrical and optical properties of Al–N co-doped p-type zinc oxide films

2004 ◽  
Vol 268 (1-2) ◽  
pp. 163-168 ◽  
Author(s):  
Fei Zhu-Ge ◽  
Zhi-Zhen Ye ◽  
Li-Ping Zhu ◽  
Jian-Guo Lü ◽  
Bing-Hui Zhao ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Optical Properties ◽  
Oxide Films ◽  
Electrical And Optical Properties ◽  
Zinc Oxide Films ◽  
P Type ◽  
Co Doped

Crystallization behavior of amorphous indium–gallium–zinc-oxide films and its effects on thin-film transistor performance

2016 ◽  
Vol 55 (3) ◽  
pp. 035504 ◽  
Author(s):  
Ayaka Suko ◽  
JunJun Jia ◽  
Shin-ichi Nakamura ◽  
Emi Kawashima ◽  
Futoshi Utsuno ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Crystallization Behavior ◽  
Thin Film Transistor ◽  
Oxide Films ◽  
Indium Gallium Zinc Oxide ◽  
Zinc Oxide Films ◽  
Indium Gallium

RF Sputtered Low-Resistivity and High-Transmittance Indium Gallium Zinc Oxide Films for Near-UV Applications

2011 ◽  
Vol 14 (3) ◽  
pp. H132 ◽  
Author(s):  
Heng-Jui Chang ◽  
Kuo-Ming Huang ◽  
Shang-Fu Chen ◽  
Tze-Hsuan Huang ◽  
Meng-Chyi Wu
Keyword(s):  
Zinc Oxide ◽  
Oxide Films ◽  
Indium Gallium Zinc Oxide ◽  
Low Resistivity ◽  
Zinc Oxide Films ◽  
Indium Gallium
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