RF Sputtered Low-Resistivity and High-Transmittance Indium Gallium Zinc Oxide Films for Near-UV Applications

2011 ◽  
Vol 14 (3) ◽  
pp. H132 ◽  
Author(s):  
Heng-Jui Chang ◽  
Kuo-Ming Huang ◽  
Shang-Fu Chen ◽  
Tze-Hsuan Huang ◽  
Meng-Chyi Wu
Keyword(s):  
Zinc Oxide ◽  
Oxide Films ◽  
Indium Gallium Zinc Oxide ◽  
Low Resistivity ◽  
Zinc Oxide Films ◽  
Indium Gallium

Low-Resistivity and High-Transmittance Indium Gallium Zinc Oxide Films Prepared by Co-Sputtering In2Ga2ZnO7 and In2O3 Targets

2019 ◽  
Vol 28 (4) ◽  
pp. 137-148 ◽  
Author(s):  
Heng-Jui Chang ◽  
Kuo-Ming Huang ◽  
Chen-Hsien Chu ◽  
Shang-Fu Chen ◽  
Tze H. Huang ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Oxide Films ◽  
Indium Gallium Zinc Oxide ◽  
Low Resistivity ◽  
Zinc Oxide Films ◽  
Indium Gallium

Crystallization behavior of amorphous indium–gallium–zinc-oxide films and its effects on thin-film transistor performance

2016 ◽  
Vol 55 (3) ◽  
pp. 035504 ◽  
Author(s):  
Ayaka Suko ◽  
JunJun Jia ◽  
Shin-ichi Nakamura ◽  
Emi Kawashima ◽  
Futoshi Utsuno ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Crystallization Behavior ◽  
Thin Film Transistor ◽  
Oxide Films ◽  
Indium Gallium Zinc Oxide ◽  
Zinc Oxide Films ◽  
Indium Gallium

Surface reactivity and oxygen migration in amorphous indium-gallium-zinc oxide films annealed in humid atmosphere

2013 ◽  
Vol 103 (20) ◽  
pp. 201904 ◽  
Author(s):  
Ken Watanabe ◽  
Dong-Hee Lee ◽  
Isao Sakaguchi ◽  
Kenji Nomura ◽  
Toshio Kamiya ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Oxide Films ◽  
Surface Reactivity ◽  
Indium Gallium Zinc Oxide ◽  
Humid Atmosphere ◽  
Zinc Oxide Films ◽  
Oxygen Migration ◽  
Indium Gallium

scholarly journals Activation of sputter-processed indium–gallium–zinc oxide films by simultaneous ultraviolet and thermal treatments

2016 ◽  
Vol 6 (1) ◽  
Author(s):  
Young Jun Tak ◽  
Byung Du Ahn ◽  
Sung Pyo Park ◽  
Si Joon Kim ◽  
Ae Ran Song ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Oxide Films ◽  
Thermal Treatments ◽  
Indium Gallium Zinc Oxide ◽  
Zinc Oxide Films ◽  
Indium Gallium
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