Two‐dimensional profiling of shallow junctions in Si metal‐oxide‐semiconductor structures using scanning tunneling spectroscopy and transmission electron microscopy
1992 ◽
Vol 10
(1)
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pp. 491
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2020 ◽
Vol 124
(27)
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pp. 14935-14940
1992 ◽
Vol 10
(4)
◽
pp. 1329
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1990 ◽
Vol 8
(1)
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pp. 311-313
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