Downstream ion drift in an electron cyclotron resonance plasma process

1996 ◽  
Vol 79 (3) ◽  
pp. 1292-1297 ◽  
Author(s):  
R. Beresford
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Plasma Process ◽  
Electron Cyclotron Resonance Plasma ◽  
Ion Drift ◽  
Resonance Plasma

Electron cyclotron resonance plasma process for InP passivation

1993 ◽  
Vol 63 (8) ◽  
pp. 1113-1115 ◽  
Author(s):  
Y. Z. Hu ◽  
M. Li ◽  
Y. Wang ◽  
E. A. Irene ◽  
M. Rowe ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Plasma Process ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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