Low-temperature synthesis of graphene on nickel foil by microwave plasma chemical vapor deposition

Y. Kim; W. Song; S. Y. Lee; C. Jeon; W. Jung; M. Kim; C.-Y. Park

doi:10.1063/1.3605560

Low-temperature synthesis of graphene on nickel foil by microwave plasma chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.3605560 ◽

2011 ◽

Vol 98 (26) ◽

pp. 263106 ◽

Cited By ~ 105

Author(s):

Y. Kim ◽

W. Song ◽

S. Y. Lee ◽

C. Jeon ◽

W. Jung ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Nickel Foil ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition

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Low-Temperature Synthesis of Diamond Films in Thermoassisted RF Plasma Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.1428 ◽

1992 ◽

Vol 31 (Part 1, No. 5A) ◽

pp. 1428-1431 ◽

Cited By ~ 13

Author(s):

Ichiro Watanabe ◽

Takashi Matsushita ◽

Koujyu Sasahara

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Rf Plasma ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition

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Low Temperature Synthesis of Diamond Films in Thermoassisted RF Plasma Chemical Vapor Deposition. II

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.792 ◽

1997 ◽

Vol 36 (Part 1, No. 2) ◽

pp. 792-797

Author(s):

Ichiro Watanabe ◽

Koushin Yoshie

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Rf Plasma ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition

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Low-temperature synthesis of graphene on Fe2O3 using inductively coupled plasma chemical vapor deposition

Materials Letters ◽

10.1016/j.matlet.2012.11.031 ◽

2013 ◽

Vol 92 ◽

pp. 437-439 ◽

Cited By ~ 13

Author(s):

Lam Van Nang ◽

Eui-Tae Kim

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Inductively Coupled Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition ◽

Inductively Coupled

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Low-Temperature Synthesis Multiwalled Carbon Nanotubes by Microwave Plasma Chemical Vapor Deposition Using CH4–CO2Gas Mixture

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.614 ◽

2003 ◽

Vol 42 (Part 1, No. 2A) ◽

pp. 614-619 ◽

Cited By ~ 29

Author(s):

Mi Chen ◽

Chieng-Ming Chen ◽

Shin-Chen Shi ◽

Chia-Fu Chen

Keyword(s):

Carbon Nanotubes ◽

Low Temperature ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Multiwalled Carbon ◽

Plasma Chemical Vapor Deposition

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Electrical characterization of graphene films synthesized by low-temperature microwave plasma chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.4825103 ◽

2013 ◽

Vol 103 (15) ◽

pp. 153106 ◽

Cited By ~ 15

Author(s):

Yuki Okigawa ◽

Kazuo Tsugawa ◽

Takatoshi Yamada ◽

Masatou Ishihara ◽

Masataka Hasegawa

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Microwave Plasma ◽

Electrical Characterization ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Graphene Films

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Low-Temperature Deposition of SiC Films by Microwave-Plasma Chemical Vapor Deposition

Journal of the Ceramic Society of Japan ◽

10.2109/jcersj.102.13 ◽

1994 ◽

Vol 102 (1181) ◽

pp. 13-17 ◽

Cited By ~ 4

Author(s):

Satoshi AOYAMA ◽

Noriyoshi SHIBATA

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Low Temperature Deposition ◽

Temperature Deposition ◽

Sic Films

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Diamond films produced by microwave plasma chemical vapor deposition at low temperature and their characterization

Materials Science and Engineering A ◽

10.1016/j.msea.2006.12.139 ◽

2008 ◽

Vol 475 (1-2) ◽

pp. 17-19 ◽

Cited By ~ 3

Author(s):

Lin Wang ◽

Yongming Wang ◽

Jian Zhou ◽

Shixi Ouyang

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Surface phase transition on silicon crystals (100) with low-temperature microwave plasma chemical vapor deposition

Russian Microelectronics ◽

10.1134/s1063739715020080 ◽

2015 ◽

Vol 44 (3) ◽

pp. 178-189 ◽

Cited By ~ 2

Author(s):

R. K. Yafarov ◽

V. Ya. Shanygin

Keyword(s):

Phase Transition ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Surface Phase ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Silicon Crystals

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Low Temperature Synthesis of Aligned Carbon Nanotubes by Direct Current Plasma Chemical Vapor Deposition

Shinku ◽

10.3131/jvsj.48.193 ◽

2005 ◽

Vol 48 (3) ◽

pp. 193-195 ◽

Cited By ~ 1

Author(s):

Yosuke WATANABE ◽

Yasuaki HAYASHI ◽

Shigehiro NISHINO

Keyword(s):

Carbon Nanotubes ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Plasma Chemical ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Plasma Chemical Vapor Deposition ◽

Direct Current Plasma ◽

Aligned Carbon Nanotubes

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Low temperature synthesis of carbon nanotubes by microwave plasma-enhanced chemical vapor deposition

Synthetic Metals ◽

10.1016/s0379-6779(99)00285-4 ◽

2000 ◽

Vol 108 (2) ◽

pp. 159-163 ◽

Cited By ~ 44

Author(s):

Young Chul Choi ◽

Dong Jae Bae ◽

Young Hee Lee ◽

Byung Soo Lee ◽

In Taek Han ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Synthesis Of Carbon Nanotubes

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