Reaction kinetics in synchrotron‐radiation‐excited Si epitaxy with disilane. I. Atomic layer epitaxy
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1994 ◽
Vol 82-83
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pp. 394-399
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1997 ◽
Vol 173
(3-4)
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pp. 343-351
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2004 ◽
Vol 1
(10)
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pp. 2545-2549
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