Mechanism of low‐temperature polycrystalline silicon growth from a SiF4/SiH4/H2plasma

1995 ◽  
Vol 77 (2) ◽  
pp. 646-652 ◽  
Author(s):  
H. Kakinuma ◽  
M. Mohri ◽  
T. Tsuruoka
Keyword(s):  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Silicon Growth

Reliability of Low Temperature Polycrystalline Silicon Thin-Film Transistors with Ultrathin Gate Oxide

2007 ◽  
Vol 46 (7A) ◽  
pp. 4021-4027 ◽  
Author(s):  
Hitoshi Ueno ◽  
Yuta Sugawara ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
Yukiharu Uraoka ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Gate Oxide ◽  
Silicon Thin Film

Low Temperature (≤550°C) Fabrication of CMOS TFT's on Rapid-Thermal CVD Polycrystalline Silicon-Germanium Films

1997 ◽  
Vol 36 (Part 1, No. 3B) ◽  
pp. 1389-1393 ◽  
Author(s):  
Seo-Kyu Lee ◽  
Seong-Min Choe ◽  
Chang-Geun Ahn ◽  
Wook-Jin Chung ◽  
Young-Kyu Kwon ◽  
...  
Keyword(s):  
Low Temperature ◽  
Silicon Germanium ◽  
Polycrystalline Silicon ◽  
Thermal Cvd ◽  
Germanium Films

Microstructures of low‐temperature‐deposited polycrystalline silicon with micrometer grains

1995 ◽  
Vol 77 (12) ◽  
pp. 6542-6548 ◽  
Author(s):  
K. C. Wang ◽  
H. L. Hwang ◽  
P. T. Leong ◽  
T. R. Yew
Keyword(s):  
Low Temperature ◽  
Polycrystalline Silicon

scholarly journals Effect of Halogen on the Structure of Low Temperature Polycrystalline Silicon Thin Films Fabricated on Glass Substrates.

1999 ◽  
Vol 107 (1251) ◽  
pp. 1099-1104 ◽  
Author(s):  
Toshio KAMIYA ◽  
Yoshiteru MAEDA ◽  
Kouichi NAKAHATA ◽  
Takashi KOMARU ◽  
Charles M. FORTMANN ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Glass Substrates ◽  
Silicon Thin Films
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