Deposition of epitaxially oriented films of cubic silicon carbide on silicon by laser ablation: Microstructure of the silicon–silicon‐ carbide interface

1995 ◽  
Vol 77 (12) ◽  
pp. 6601-6608 ◽  
Author(s):  
L. Rimai ◽  
R. Ager ◽  
W. H. Weber ◽  
J. Hangas ◽  
A. Samman ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Laser Ablation ◽  
Oriented Films ◽  
Cubic Silicon Carbide ◽  
Silicon Silicon

Deposition of Epitaxially Oriented Films of Cubic SiC on Silicon by Laser Ablation of Elemental Targets.

1994 ◽  
Vol 339 ◽  
Author(s):  
L. Rimai ◽  
R. Ager ◽  
W. H. Weber ◽  
J. Hangas ◽  
B. D. Poindexter
Keyword(s):  
Silicon Carbide ◽  
Laser Ablation ◽  
Crystalline Silicon ◽  
Epitaxial Films ◽  
Ablation Plume ◽  
Silicon Substrates ◽  
Pure Silicon ◽  
Silicon Target ◽  
Oriented Films ◽  
Pure Carbon

ABSTRACTSilicon carbide films are grown epitaxially on crystalline silicon substrates heated above 1000 °C, by laser ablation of pure carbon targets to thicknesses between 300 and 400 nm. These films grow on top of the silicon substrate from the carbon in the ablation plume and from the silicon of the substrate. By using a method of alternate ablation of a pure carbon and a pure silicon target, similar epitaxial films can be grown to thicknesses in excess of 1 μm with part of the silicon being supplied by the ablation plume of the silicon target.

Theoretical study of intrinsic defects in cubic silicon carbide 3C -SiC

2021 ◽  
Vol 103 (19) ◽  
Author(s):  
Peter A. Schultz ◽  
Renee M. Van Ginhoven ◽  
Arthur H. Edwards
Keyword(s):  
Silicon Carbide ◽  
Theoretical Study ◽  
Intrinsic Defects ◽  
Cubic Silicon Carbide

scholarly journals Lithography and Etching‐Free Microfabrication of Silicon Carbide on Insulator Using Direct UV Laser Ablation

2020 ◽  
Vol 22 (4) ◽  
pp. 1901173
Author(s):  
Tuan‐Khoa Nguyen ◽  
Hoang-Phuong Phan ◽  
Karen M. Dowling ◽  
Ananth Saran Yalamarthy ◽  
Toan Dinh ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Laser Ablation ◽  
Uv Laser

Mechanical behaviour of silicon-silicon carbide composites

1996 ◽  
Vol 16 (7) ◽  
pp. 703-712 ◽  
Author(s):  
E. Scafè ◽  
G. Giunta ◽  
L. Fabbri ◽  
L. Di Rese ◽  
G. De Portu ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Mechanical Behaviour ◽  
Silicon Silicon

Modeling of excimer laser ablation of silicon carbide

2021 ◽  
Vol 104 (11) ◽  
Author(s):  
Chen Lu ◽  
Meng-meng Gao ◽  
Ting-ting Hu ◽  
Zhi-zhan Chen
Keyword(s):  
Silicon Carbide ◽  
Laser Ablation ◽  
Excimer Laser ◽  
Excimer Laser Ablation
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